Problem evalign SNF 2012-10-12 09:26:46: Mask Holder Damaged

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jan 11 13:05:51 PST 2013


Reseated all PC boards and connectors. Tested at various separation gaps from 1 to 800 microns. Align gap responding properly now. Possibly a bit was stuck and align gap setting not being interpreted correctly. Tested many times with mask and wafer  load/unload/expose. Reset the tool many times. Align gap working correctly now. Please report if problem returns



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