lithography on quartz

Sanli Ergun sanli at piezo.Stanford.EDU
Mon Aug 14 14:04:30 PDT 2000

Hi everybody,
I believe there are people working with quartz wafers. My question is to
those who do. How do you do the exposure? I mean how do you manage the
multiple reflections from the backside? To be more specific I have
polysilicon, silicon nitride and polysilicon deposited on the quartz wafer
in the order given. Does anyone have such an experience, or suggestions?


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