10 micron resist

Chen Tze Wee tzewee at stanford.edu
Fri Aug 16 22:27:41 PDT 2002

Dear all,
  Does anybody know how can I lay a 10 micron layer thick of photoresist on a Si wafer?

  I know it is not part of the standard programs, so I would appreciate any tips and advise on layering the resist on, and the modifications needed to develop it. Any post bake instructions will be helpful too.

  I would also like to know if 10.0 sec of exposure under the EV is good enough to resolve ~2 micron features.


Tze Wee
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