10 micron resist
Chen Tze Wee
tzewee at stanford.edu
Fri Aug 16 22:27:41 PDT 2002
Does anybody know how can I lay a 10 micron layer thick of photoresist on a Si wafer?
I know it is not part of the standard programs, so I would appreciate any tips and advise on layering the resist on, and the modifications needed to develop it. Any post bake instructions will be helpful too.
I would also like to know if 10.0 sec of exposure under the EV is good enough to resolve ~2 micron features.
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