From mahnaz at snf.stanford.edu  Tue Feb  3 09:36:59 2004
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Tue, 03 Feb 2004 09:36:59 -0800
Subject: DOWN
Message-ID: <401FDC3B.71F40F7C@snf.stanford.edu>


Hello all,

Just a kind reminder that EV aligner will be down as soon as F/S gets
here about 1 hour.
We will try to replace the bottom optic and   bellows  to the WEC unit.

mahnaz



From mahnaz at snf.stanford.edu  Tue Feb  3 18:35:50 2004
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Tue, 03 Feb 2004 18:35:50 -0800
Subject: up
Message-ID: <40205A86.5AFFD377@snf.stanford.edu>


Hello all,

Finally at last,
Right bottom optic is replaced ( with our original one) and O-ring on
the frame has been replaced which caused  vacuum leakage during si to si
bond alignment. all fixed and checked twice with Mike daneman's  help (
Thanks Mike).

All 4 bellows on the tool has been replaced actually one of the bellows
had a tear on it, I ran a wafer 1 um resolved .
it is all fixed and I hope stays like this for awhile " be nice to the
machine"

mahnaz



From sanli at stanford.edu  Mon Feb 23 10:25:43 2004
From: sanli at stanford.edu (Arif Sanli Ergun)
Date: Mon, 23 Feb 2004 10:25:43 -0800
Subject: cancelled my reservation today 13:00-15:00
Message-ID: <5.2.1.1.2.20040223102513.00b49c50@sanli.pobox.stanford.edu>


Sanli