From mahnaz at snf.stanford.edu Wed Jan 7 14:43:44 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Wed, 07 Jan 2004 14:43:44 -0800 Subject: up date Message-ID: <3FFC8BA0.DDB91132@snf.stanford.edu> Hello all, I made some adjustment on the EV this morning and I ran few tests. I was able to resolve 1 um line and space on 1 um resist thickness with 1.0 second of exposure. 1 um line was resolved on 1.6 um thickness resist with 1.5 second of exposure. mahnaz From mahnaz at snf.stanford.edu Fri Jan 9 12:07:09 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 09 Jan 2004 12:07:09 -0800 Subject: up date Message-ID: <3FFF09ED.EFCA0C3@snf.stanford.edu> Hello all, The problem I was seeing on the system was actually caused by my resolution mask. I have no idea what has happened to it. Although we end up to open the optical path and clean the mirror and vacuum the lamp house and calibrate the lamp intensity few times. The system is up , we do see an intermittent problem with WEC unit which mostly effect 2 um resolution and less. I have put an order for the bellows and as soon as parts are here I will let you know. mahnaz From nmehenti at stanford.edu Fri Jan 16 10:39:54 2004 From: nmehenti at stanford.edu (Neville Mehenti) Date: Fri, 16 Jan 2004 10:39:54 -0800 Subject: reservation from 11:30-12:30 cancelled, samples not ready Message-ID: <5.2.1.1.2.20040116103908.02abbd78@nmehenti.pobox.stanford.edu> From mahnaz at snf.stanford.edu Wed Jan 28 14:39:21 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Wed, 28 Jan 2004 14:39:21 -0800 Subject: down time Message-ID: <40183A19.11320B0F@snf.stanford.edu> Hello all, Finally our bottom optic has been fixed and now they need to be put in to the system. We are using the down time to change the bellow as well so that should take care of the intermittent issue with resolving the 1 um on the tool. The down day is Tuesday 2/3 from 9:30 in the morning till when is fixed. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: