From mahnaz at snf.stanford.edu  Thu Nov  3 16:26:29 2005
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Thu, 03 Nov 2005 16:26:29 -0800
Subject: up
Message-ID: <436AAAB5.70704@snf.stanford.edu>


Hello all,

Yesterday afternoon I shut down the EValigner  due to poor resolution.
Today we adjusted the WEC and chuck presser and ran few tests.
The lamp intensity has been checked and  is about 13.4 mw.
The 1 um resist exposed with 1.1 second  and the 60 second PEB
results are:
  top   1.0 um resolved
center 1.0 um resolved
flat 1.0 um resolved

right 2.0 um resolved
left 2.0 um resolved

Please do not play with the system setting and please please report any 
issues and problem you have with the  system. I love to hear from you.

mahnaz


From mahnaz at snf.stanford.edu  Wed Nov  9 16:36:21 2005
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 09 Nov 2005 16:36:21 -0800
Subject: up date
Message-ID: <43729605.6090205@snf.stanford.edu>


Hello all,

I ran another test this afternoon and the result is 1 um resolved on 
top, center and flat
1.5 um resolved on right and left side of the wafer.

mahnaz