mahnaz at snf.stanford.edu
Thu Nov 3 16:26:29 PST 2005
Yesterday afternoon I shut down the EValigner due to poor resolution.
Today we adjusted the WEC and chuck presser and ran few tests.
The lamp intensity has been checked and is about 13.4 mw.
The 1 um resist exposed with 1.1 second and the 60 second PEB
top 1.0 um resolved
center 1.0 um resolved
flat 1.0 um resolved
right 2.0 um resolved
left 2.0 um resolved
Please do not play with the system setting and please please report any
issues and problem you have with the system. I love to hear from you.
More information about the evalign