up

Mahnaz Mansourpour mahnaz at snf.stanford.edu
Thu Nov 3 16:26:29 PST 2005


Hello all,

Yesterday afternoon I shut down the EValigner  due to poor resolution.
Today we adjusted the WEC and chuck presser and ran few tests.
The lamp intensity has been checked and  is about 13.4 mw.
The 1 um resist exposed with 1.1 second  and the 60 second PEB
results are:
  top   1.0 um resolved
center 1.0 um resolved
flat 1.0 um resolved

right 2.0 um resolved
left 2.0 um resolved

Please do not play with the system setting and please please report any 
issues and problem you have with the  system. I love to hear from you.

mahnaz



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