update

Mahnaz Mansourpour mahnaz at snf.stanford.edu
Wed Jan 4 16:46:40 PST 2006


Hello all,
I like to let you know that I did test the system this morning  and the 
results are

with 1 um resist exposure 1.0 second hard contact
Top, center, flat  1/1.5 um were resolved
right and left 2/2.5 were resolved

with 1.6 um  resist best exposure  is 1.6 second and these information 
has been logged in the exposure log sheet next to the system:

1.5 um was resolved on top, center, flat
Right and left  minimum of 3.0 um  resolved
I will ask Mike to take a look at it tomorrow.

mahnaz



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