From mahnaz at snf.stanford.edu Mon Apr 30 11:32:28 2007 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 30 Apr 2007 11:32:28 -0700 Subject: exposure Message-ID: <4636363C.1060006@snf.stanford.edu> Hello all, It has been few weeks that I have noticed a drift in Exposure with EV aligner. Part of the problem probably is coming from the ellipsoid mirror which has gotten fogy and need to be replaced. We need to take a picture of the mirror so I can see if I can order it through a second source for now there is nothing wrong with adjusting the exposure dose a little bit. for 1 um resist thickness use 1.5 to 1.8 seconds of exposure depending on your mask for 1.6 um resist thickness use 1.9 to 2.2 seconds of exposure depending on your mask for 3 um resist thickness use 2.9 to 3.3 seconds of exposure depending on your mask There is a red binder at SVG coat table with all the results from weekly check on all the contacts aligners , please check it out. Please note any other problem on coral. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: