From gsosa at stanford.edu  Fri Apr 11 17:24:48 2008
From: gsosa at stanford.edu (Gary J Sosa)
Date: Fri, 11 Apr 2008 17:24:48 -0700
Subject: EV Align Update 4/11
Message-ID: <20080411172448.cbrrqnk2s4cgc0o4@webmail.stanford.edu>

Hi Users

EV Align Update 4/11;

  The blockage in the mask top plate has been cleared. The top plate  
is being installed and set up there are some initialization issues  
possibly doe to the mask plate position. System is still down.

   ..Gary



From gsosa at stanford.edu  Tue Apr 15 16:08:20 2008
From: gsosa at stanford.edu (Gary J Sosa)
Date: Tue, 15 Apr 2008 16:08:20 -0700
Subject: EVG 620 Update 4/15/08
Message-ID: <20080415160820.w9xuasjgysswgg80@webmail.stanford.edu>

Hi EVG Users..

EVG 62 Update 4/15/2008

Had to remove the top plate again to determine what was causing the  
plate from binding up and failure to complete initialization. Checked  
and re-soldered 2 pin connections on the upper ball switch PCB  
assembly. The solder joints probably deterioreted when we heated up  
the vacuum channel cover plate with a heat gun( The PC board was very  
near by). Tested continuity and ball switch operation- All looks good.  
Also when we re-installed the top plate, we did not tighten down the  
upper position nut as much as the first installation, which may have  
caused the binding. Re-assembled system and did full initialization-  
All OK. Repeated several times with no problem. Finally tested mask  
vacuum which was the original problem- All OK. Powered up and tuned UV  
lamp. Intensity is 12.27mw/cm2 and uniformity is 1.7. If all goes well  
we will green light the tool tomorrow morning after we expose and  
inspect a test wafer with resolution mask.  GS/MV