From mahnaz at stanford.edu Mon Mar 10 13:58:11 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 10 Mar 2008 13:58:11 -0700 Subject: Down time Message-ID: <47D5A0E3.6020203@stanford.edu> Hello all, Just a kind remainder that we are set for wec replacement tomorrow 3/11. The system will go down as soon as the FSE gets here which will be around 10:30 in the morning. mahnaz From dlee76 at stanford.edu Mon Mar 10 19:45:57 2008 From: dlee76 at stanford.edu (Donkoun Lee) Date: Mon, 10 Mar 2008 19:45:57 -0700 Subject: AZ5214 Message-ID: <095F182A-7033-4870-8335-A9258C09242E@stanford.edu> Hi all. Have you ever used AZ5214 before? If you have, can I share your process specification? I really appreciate for your time and consideration, in advance. Regards, Donkoun Lee From mahnaz at stanford.edu Tue Mar 11 15:21:08 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 11 Mar 2008 15:21:08 -0700 Subject: system available today Message-ID: <47D705D4.3070705@stanford.edu> Hello all, The system is available today. The plan slightly changed. due to late arrival of the FSE eng. I have booked the system for Wednesday and Thursday and if the system comes up earlier we will communicate with you. mahnaz From mahnaz at stanford.edu Thu Mar 13 15:15:26 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 13 Mar 2008 15:15:26 -0700 Subject: UP date Message-ID: <47D9A77E.1030009@stanford.edu> Hello all, The WEC unit on the system has been replaced. I ran many wafers and 1.5 um L/S has been resolved on all the 5 sites. I am little concern about resolution on both he right and left side of the wafer with flat toward you. The EVG fse is aware of that and we will work on that tomorrow morning. System is up so pleas use it and let me know about any issues and concerns. For 1 um 3612 exposure is 1.2 seconds and lamp uniformity is 12 mw. Also in order to center the chuck, the X micrometer should be on 20 and Y on 5. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Fri Mar 14 15:58:43 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 14 Mar 2008 15:58:43 -0700 Subject: EV update Message-ID: <47DB0323.5020607@stanford.edu> Hello all, We did more work on the system today and Linda W. checked the system in bond alignment mode ( thanks Linda). We found that the system moved about 2 um in Y direction. The culprit was the Y micrometer so I thought that I need to order it but Mario came through and had a brand new one which he already installed it for us. So we are good to go on that. We still see the drift in lamp intensity but I do see that on almost all our aligners. I have asked EVG to give me a quote for a integrator which will give us the capability of running the system in constant exposure mode ( due to old software, I am not able to do that now). To center the chuck set the micrometers on X=20 and Y= 5 Exposure for 1 um 3612 resist is around 1.3 +/_ .2 depending on your mask polarity. Please be gentle with system and report any issues and problem on coral. Mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Wed Mar 26 17:51:36 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 26 Mar 2008 17:51:36 -0700 Subject: shut down Message-ID: <47EAEF98.5050200@stanford.edu> Hello all, system reboots but then gives error "uc04 initialization error" Gary and I tried to restart the system few times with no luck. Called EVG hot line, Gary checked all the cables and coral connections, all seems ok. seems software, hardware problem, log file has been send to EVG. mahnaz