[evbond-pcs] Shutdown evbond SNF 2013-01-25 15:57:29: getting stuck in heat step

mahnaz at stanford.edu mahnaz at stanford.edu
Fri Jan 25 15:57:30 PST 2013


Aswin has been trying to run it for the last two days and the system in 
heat step error out of running out of time.
I want to test the anodic bond, the tool is too hot  and can not change to 
quartz plate till 6 pm.
I have unloaded the wafers and we will test the system on Monday.


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