eutectic bonding with PolySi?

Yahong Yao yyao at intpax.com
Fri Aug 31 09:20:49 PDT 2001


Hello All,

I want to do a Si-Au eutectic bonding.  But the Si surface is coated
with multi films with PolySi (1000A thick) on top.  I am wondering if
Si-Au eutectic bonding can be conducted on this PolySi surface.  Any
input is highly appreciated.

Have a great long week end.

Yahong




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