From kimsangb at stanford.edu Tue Aug 17 02:13:37 2004 From: kimsangb at stanford.edu (SangBum Kim) Date: Tue, 17 Aug 2004 02:13:37 -0700 Subject: Direct Si bonding recipe Message-ID: <003301c4843a$7b6c20f0$59b50c80@LocalHost> SNF evbond users, I got this recipe for direct Si bonding and plan to use it as it is. Could you give me some information about how long it will take? There are two 'WAIT Pressure 1E-4 mbar' commands and I wonder how long they take. Thank you very much! SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Tue Aug 17 02:25:41 2004 From: kimsangb at stanford.edu (SangBum Kim) Date: Tue, 17 Aug 2004 02:25:41 -0700 Subject: Direct Si bonding recipe Message-ID: <003e01c4843c$2b0664c0$59b50c80@LocalHost> SNF evbond users, I am sorry I forgot to include the recipe in the previous mail. This is the recipe. Command: Param1: Param2 Pump on high vac WAIT Pressure 1E-4 mbar Pump off Purge on WAIT Time 0:00:30 Vent On WAIT Time 0:00:15 Purge off WAIT Time 0:00:15 Pump On high vac WAIT Pressure 1E-4 mbar Wafer Bow WAIT Time 0:00:15 Flags OUT Middle Flags OUT Left Flags OUT Right WAIT Time Electr. DOWN 1750N WAIT Time 0:0030 Pump off Electrode UP Thanks!! SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From aflannery at agilemicro.com Mon Aug 30 11:46:20 2004 From: aflannery at agilemicro.com (aflannery at agilemicro.com) Date: Mon, 30 Aug 2004 14:46:20 -0400 Subject: Remove reservation Message-ID: <1093891580.413375fcb800a@webmail.agilemicro.com> I apologize for the late notice. I won't be using my reservation time today on the EVBonder. I will remove it. Tony