From afflannery at comcast.net Fri Jul 9 22:41:37 2004 From: afflannery at comcast.net (Anthony Flannery) Date: Fri, 9 Jul 2004 22:41:37 -0700 Subject: Process Info Message-ID: <009301c46640$915d7de0$706140ab@Ibscus3> All, There are a lot of different types of bonding going on these days. Sometimes the machine is left with the steel plate, and sometimes with the glass. It might help, especially around weekends, if you indicated the type of process you were going to be doing in your reservation (anodic, eutectic, or fusion). There are one or two advanced users who can help by changing the plate over to the one you will need. A courteous user can try and arrange for a necessary changeover, but they can only do this if you indicate what you need in your reservation. It's my understanding that if you attempt to change the plate without authorization and the proper training, you and your family will be tortured horribly by the staff. If you attempt to change the plate without authorization and damage the bonder because you don't know what you are doing, the staff may not get a chance to torture you because you will be ripped apart into little bloody bits by the other users. Tony Flannery -------------- next part -------------- An HTML attachment was scrubbed... URL: From jzheng at rheosense.com Wed Jul 21 08:55:19 2004 From: jzheng at rheosense.com (Jun Zheng) Date: Wed, 21 Jul 2004 08:55:19 -0700 Subject: experience for SOI-glass anodic bonding Message-ID: <000701c46f3b$231bbaf0$6801a8c0@RheoSenseJun> Hi, EV bonder users: Sorry to bother your people. I like to know if any one has done anodic bonding for SOI wafer, or bonding Si to glass with intermediate oxide layer. I need such information for bonding my wafer at EV bonder. Thanks! Jun Zheng Senior MEMS Engineer RheoSense Inc. (925)866-3802 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at snf.stanford.edu Thu Jul 22 08:28:19 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Thu, 22 Jul 2004 08:28:19 -0700 Subject: down Message-ID: <40FFDD13.F773AACA@snf.stanford.edu> Hi all, we are waiting for parts to arrive, I am hoping to get them by Friday. I have been told that parts had been shipped to me already. mahnaz From mahnaz at snf.stanford.edu Tue Jul 27 16:20:29 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 27 Jul 2004 16:20:29 -0700 Subject: Up Message-ID: <4106E33D.C2FBE7C5@snf.stanford.edu> Hello all The EV bonder is fixed and up: Here is the deal on the glass frame with vacuums groove on it. You are only allowed to use it when you are doing precision alignment on EV aligner if you break it because you forgot it or use it for doing manual alignment, YOU SIMPLY PAY FOR IT. Few of you have talked to me on the status of the system with regards o quartz or steel plate unfortunately for time being the best approach will be this: When making reservation on the system, after choosing your slots and when the window comes up with your info on the process it says "Default" delete that and write STEEL or QUARTZ. when checking the reservation, all you need to click on whoever has reservation and that can show what kind of plate they are interested in. Users with steel plate need to give at least 1.5 hour for cool time and exchange of plate. we need to work on this especially during weekend it can only be steel or quartz so communication among ourselves is very important. Any suggestion is welcome mahnaz From martinez at snf.stanford.edu Wed Jul 28 16:18:36 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 28 Jul 2004 16:18:36 -0700 Subject: megasonic cleaner Message-ID: <4108344C.5B836712@snf.stanford.edu> an additional vacuum line has been installed to help the megasonic cleaner reach the chuck vacuum set point before the controller alarms. "soft vac" is always present at the chuck and should not interfere with loading and aligning the wafer. if you do have any problems please let me know. mike