experience for SOI-glass anodic bonding
jzheng at rheosense.com
Wed Jul 21 08:55:19 PDT 2004
Hi, EV bonder users:
Sorry to bother your people. I like to know if any one has
done anodic bonding for SOI wafer, or bonding Si to glass with
intermediate oxide layer. I need such information for bonding my wafer
at EV bonder.
Senior MEMS Engineer
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the evbond