experience for SOI-glass anodic bonding

Jun Zheng jzheng at rheosense.com
Wed Jul 21 08:55:19 PDT 2004


Hi, EV bonder users:
 
            Sorry to bother your people. I like to know if any one has
done anodic bonding for SOI wafer, or bonding Si to glass with
intermediate oxide layer. I need such information for bonding my wafer
at EV bonder.
 
            Thanks! 
 
Jun Zheng
Senior MEMS Engineer
RheoSense Inc.
(925)866-3802
 
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