megasonic cleaner

Mike Martinez martinez at snf.stanford.edu
Wed Jul 28 16:18:36 PDT 2004


an additional vacuum line has been installed to help the megasonic
cleaner reach the chuck vacuum set point before the
controller alarms. "soft vac" is always present at the chuck and should
not interfere with loading and aligning the wafer.
if you do have any problems please let me know.

mike





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