From rcrane at snf.stanford.edu  Tue Jun 15 15:13:55 2004
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Tue, 15 Jun 2004 15:13:55 -0700
Subject: Purge gas note
Message-ID: <40CF74A3.8A3831F@snf.stanford.edu>

EV 501 bonder users,

While plumbing in an alternate purge gas for a special use, Ray Seymour
discovered that the EVbonder purge cycle gas was actually just room air,
not N2. It appears that N2 has never been plumbed to the tool. The room
air purge may have been a source of particles and definitely of O2
(possible oxidation issues). An N2 purge line will be plumbed to the
tool tomorrow.

The tool is current venting with room air. As soon as appropriate safety
valves are obtained, the vent line will also be plumbed to N2.

Thanks,

Dick



From martinez at snf.stanford.edu  Thu Jun 17 10:36:12 2004
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Thu, 17 Jun 2004 10:36:12 -0700
Subject: magasonic problem
Message-ID: <40D1D68C.82C30DCF@snf.stanford.edu>

If idle for more than 8 - 10 hours, the megasonic cleaner will require
10 - 15 minutes to draw 20" vacuum pressure
before it will clean the wafer. please silence the alarm and let the
system sit for that amount of time, then press start again.
we are working on rebuilding the spindle assembly for the megasonic
cleaner.

mm