Purge gas note

Dick Crane rcrane at snf.stanford.edu
Tue Jun 15 15:13:55 PDT 2004

EV 501 bonder users,

While plumbing in an alternate purge gas for a special use, Ray Seymour
discovered that the EVbonder purge cycle gas was actually just room air,
not N2. It appears that N2 has never been plumbed to the tool. The room
air purge may have been a source of particles and definitely of O2
(possible oxidation issues). An N2 purge line will be plumbed to the
tool tomorrow.

The tool is current venting with room air. As soon as appropriate safety
valves are obtained, the vent line will also be plumbed to N2.



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