magasonic problem

Mike Martinez martinez at snf.stanford.edu
Thu Jun 17 10:36:12 PDT 2004


If idle for more than 8 - 10 hours, the megasonic cleaner will require
10 - 15 minutes to draw 20" vacuum pressure
before it will clean the wafer. please silence the alarm and let the
system sit for that amount of time, then press start again.
we are working on rebuilding the spindle assembly for the megasonic
cleaner.

mm





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