From aflannery at invensense.com Mon Sep 6 16:35:12 2004 From: aflannery at invensense.com (Anthony Flannery) Date: Mon, 6 Sep 2004 16:35:12 -0700 Subject: Reservations Message-ID: All, Reservations for the EVBOND are tight this week. If you think you might not need your time, please be courteous and let all users know ASAP. I also wanted to remind everyone of the policy regarding reservations and grace period. If you aren't there 15 minutes after your reservation starts and someone else snags it, you loose all your reserved time, not just some block of it. The user who grabs your time is under no obligation to release the machine until they are done or the next reservation comes up. Tony -------------- next part -------------- An HTML attachment was scrubbed... URL: From bashar at snf.stanford.edu Tue Sep 7 18:57:43 2004 From: bashar at snf.stanford.edu (Shabbir A. Bashar, Ph.D.) Date: Tue, 7 Sep 2004 18:57:43 -0700 Subject: reservation cancelled Message-ID: Sorry about the late notice but my samples are not ready for me to be able use the EV Bonder tomorrow from 12:00am till 10:00am. -------- Shabbir From mtang at snf.stanford.edu Thu Sep 16 16:36:09 2004 From: mtang at snf.stanford.edu (Mary Tang) Date: Thu, 16 Sep 2004 16:36:09 -0700 Subject: Reservations! Message-ID: <414A2369.923F0A1D@snf.stanford.edu> Hi all -- I get to be the reservations queen again, so here goes... in an attempt to address difficulties in getting reservations on the system, we'd like your feedback on the following: 1. How often you use the tool 2. What kind of frame (steel or anodic) do you usually use? 3. How long your process is This information will no doubt influence the reservation policy. We'd also like to get your feedback on possible reservation policy changes -- and we're thinking along the following lines: 1. Limit the length of a single reservation during prime time to four hours. Reservations off-prime time should not extend into prime time. 2. Limit the total time for reservations to 12 hours in a rolling 7-day period. Let us know what you think. I should say that the logic behind this proposal is to encourage higher turnover during daytime hours, when staff can be on-hand to facilitate changeover between the steel frame and anodic bonding frame, and to limit potential hogging of the tool by any individual. We'd like to implement some sort of policy change as soon as possible, so your prompt feedback would be greatly appreciated. Thanks, Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From ami at appnano.com Fri Sep 17 17:29:38 2004 From: ami at appnano.com (Ami Chand) Date: Fri, 17 Sep 2004 17:29:38 -0700 Subject: Evbond available on Sun 9am to 3 pm Message-ID: <000001c49d16$950dfde0$8b6240ab@achand> Mahnaz reserved the tool for me but my samples are not ready. Please feel free to use the time. Thanks, ami From aflannery at invensense.com Thu Sep 23 12:30:36 2004 From: aflannery at invensense.com (Anthony Flannery) Date: Thu, 23 Sep 2004 12:30:36 -0700 Subject: Bonding Tool Message-ID: All, I did some work on the newer bonding tool. There were a couple of things wrong with it. 1. The center chuck was loose inside the frame. This lead to gross misalignment as the wafer position would shift during clamping on the aligner. 2. The flags had become loose over time. They would deflect enough that they came into contact with the stainless steal of the frame and stick. I adjusted these so that they do not deflect with moderate pressure and move smoothly. 3. It looks like the pivot pins on the flags may have become worn over time. 4. The flag arms may have developed a slight bow. I replaced a couple of the pins and arms. To all the bonding tool users. 1. If you are doing a manual alignment with no flags, please use the older tool (the darker one). 2. Aligned bonds should use the newer (brighter) bonding tool. Verify that the center piece of the tool is still tight before bonding with it. 3. The flags are not supposed to be loose. They are supposed to glide with a small amount of resistance. If you loosen them because you think that makes them pull easier, you are doing a bad thing. Please don't do that. If you decide that you need to adjust them, for whatever reason, please let me know. I would prefer that you didn't. 4. I had some feedback from Chad Brubaker about two things which should improve both slipping and flag pull. A. Make sure the wafer bow is set correctly. If you are concerned, you can subtract 100 - 200 um from the stack height. This increases the force of the wafer bow slightly. B. Pull the flags one at a time and insert a wait state of 10 seconds between each pull. This works better than pulling the flags simultaneously. I am hoping this solves the problem with flag pulling getting stuck. If you do an aligned bond, in the next couple of weeks, please drop me a line and let me know what your experience is (i.e. did the flags pull). Thanks much, Tony Anthony F. Flannery Jr. Director of Development MEMS Gyroscope Invensense, Inc. 2900 Gordon Ave., Suite 203 Tel: 408-720-8482 ext. 203 Cell: 408-515-4026 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at snf.stanford.edu Fri Sep 24 17:00:17 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 24 Sep 2004 17:00:17 -0700 Subject: lamp Message-ID: <4154B511.DB275AE1@snf.stanford.edu> Hello all, I have been told by Tony that we will get the lamps on Monday. I hope we will be able to get the bonder up and running by afternoon. mahnaz From mtang at snf.stanford.edu Mon Sep 27 13:01:20 2004 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 27 Sep 2004 13:01:20 -0700 Subject: Reservations Message-ID: <41587190.6050005@snf.stanford.edu> Hi everyone -- No, the bonder is not quite up yet, but we thought this might be a good opportunity to revisit the reservations policies. Based on feedback (thanks!) we'd like to propose the following: 1. Limit the length of a single reservation during prime time to four hours. 2. Reservations off-prime time should not extend into prime time (there was one objection to this point, but several affirmatives.) 3. Limit the total time for reservations to 24 hours in a rolling 7-day period. 4. Dedicate Mondays, Wednesdays, and Fridays to the steel frame; Tuesday, Thursdays, and weekends to the anodic bonding frame. 5. Do not leave a gap of less than three hours between reservations (since one hour is meaningless on the evbond.) If this meets with everyone's general approval, then we'd like to start implementing this policy as soon as possible. Please let me know what you think -- Thanks, Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From cm_richter at att.net Wed Sep 29 09:45:04 2004 From: cm_richter at att.net (cm_richter at att.net) Date: Wed, 29 Sep 2004 16:45:04 +0000 Subject: EV Bond: Cancelled Reservation Thursday 4pm-7pm Message-ID: <092920041645.543.415AE68E0004C42C0000021F21602807419D0A9B080C079DA1030C@att.net> From alan.m.myers at intel.com Thu Sep 30 08:49:39 2004 From: alan.m.myers at intel.com (Myers, Alan M) Date: Thu, 30 Sep 2004 08:49:39 -0700 Subject: Reservation cancelled 10-1 from 13:00-17:00 Message-ID: <8A3152FDE2948B42AECCF93BFFA130EC02601FE6@scsmsx401.amr.corp.intel.com> From aflannery at invensense.com Thu Sep 30 15:49:30 2004 From: aflannery at invensense.com (Anthony Flannery) Date: Thu, 30 Sep 2004 15:49:30 -0700 Subject: Reservation removed 10/1 6:00-10:00 Message-ID: Time opened up later and we'd like to sleep. Tony Anthony F. Flannery Jr. Director of Development MEMS Gyroscope Invensense, Inc. 2900 Gordon Ave., Suite 203 Santa Clara, CA 95051 Tel: 408-720-8482 ext. 203 Cell: 408-515-4026 -------------- next part -------------- An HTML attachment was scrubbed... URL: