From mahnaz at snf.stanford.edu  Tue Sep 27 15:23:03 2005
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Tue, 27 Sep 2005 15:23:03 -0700
Subject: Turbo pump
Message-ID: <4339C647.8070507@snf.stanford.edu>


Hello all,

I like to let you  know that the turbo pump on the EV bonder is not 
working. I am in the process of getting a quote  for the pump through 
EVG and also to see if is possible to fix the one  we have.  It might 
take few days so.... till then   unless you are doing a very critical 
work and need high vacuum  you should be able to use the system . When 
running the recipe when sits on the step for the turbo ( to get the 
vacuum required by the recipe)  simply say NEXT on the recipe and 
advance it to the  next step.
Need help see me or Mike and Mario

mahnaz