mahnaz at stanford.edu
Tue Aug 12 16:14:34 PDT 2008
We have been planning to increase the exhaust on the KS coater for some
times. I just found out the work will be done tomorrow from 9-2 pm.
These information has been communicated to us at last minute as well. We
are hoping that the work will be done around 1 pm but one never will know.
The equipment will be impacted are ASML, EV Bonder and KS coater.
Sorry for any inconvenient this may cause.
More information about the evbond