Megasonic cleaner

Mahnaz Mansourpour mahnaz at stanford.edu
Tue Mar 9 10:24:50 PST 2010


Hello all,

after a week of  agonizing trouble shooting Richard Clark of EVG has 
determined that the controller is out.
The part has been ordered and we will install it when received.
Please note that we do not have any documents or schematic for the tool.
The tool is one of the original prototype tool for EVG and many of FSE  
are not familiar with this tool either.

mahnaz



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