Megasonic cleaner
Mahnaz Mansourpour
mahnaz at stanford.edu
Tue Mar 9 10:24:50 PST 2010
Hello all,
after a week of agonizing trouble shooting Richard Clark of EVG has
determined that the controller is out.
The part has been ordered and we will install it when received.
Please note that we do not have any documents or schematic for the tool.
The tool is one of the original prototype tool for EVG and many of FSE
are not familiar with this tool either.
mahnaz
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