From mahnaz at stanford.edu Mon Nov 1 08:49:00 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 01 Nov 2010 08:49:00 -0700 Subject: Anodic graphite Message-ID: <4CCEE16C.3030309@stanford.edu> Hello all, Today the system will switch to Quartz plate but the graphite for anodic the one that measure 2.10 mm has been damaged due to arcing. I am hesitant to use that and i have ordered two sets of screw, washers and the spring band steel which will be here in a next day or so. So mean while you need to use the solid graphite which measure 3.0 mm. mahnaz From mahnaz at stanford.edu Wed Nov 17 10:10:41 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 17 Nov 2010 10:10:41 -0800 Subject: Alignment shift Message-ID: <4CE41AA1.6070706@stanford.edu> Hello all, I did a training on the system yesterday and I was shocked to find out that the tension on the two latches ( the one we turn to keep the glass frame in tack so the wafers which are lined up not move) is so gone that alignment moved at least by 20 mm. *I am shocked that no one has reported it. * I have taken the chuck out of the lab and replaced it with precision chuck at the moment. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Mon Nov 29 15:56:41 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 29 Nov 2010 15:56:41 -0800 Subject: Bonder Graphite Message-ID: <4CF43DB9.7010906@stanford.edu> hello all, I like to make some clarification... Mario replaced all the screws and metal strips on the anodic graphite on Wednesday 11/24th. But Mario failed to update coral with the information and that caused some confusion. Elizabeth has mentioned some stuff that I am not sure what does it mean? We have two different graphite in the EV bonder One measures 3.0 mm used for eutectic bonding and The other one measures at 2.1 mm that is used for anodic bonding. That is true that the anodic one does measure 3 .0 mm around the edge but measures 2.1mm in the flexible ( center) part of the graphite. All these info are in the procedure next to the tool. Secondly, the anodic bond recipe " the new standard. aba" is written in a way that there is a vacuum level to be reached in three parts. The final holding for vac. in my recipe is after the system has been heated up to 350C which helps to get to 10-5. So please follow the instruction mahnaz .