Alignment shift
Mahnaz Mansourpour
mahnaz at stanford.edu
Wed Nov 17 10:10:41 PST 2010
Hello all,
I did a training on the system yesterday and I was shocked to find out
that the tension on the two latches ( the one we turn
to keep the glass frame in tack so the wafers which are lined up not
move) is so gone that alignment moved at least by 20 mm.
*I am shocked that no one has reported it.
*
I have taken the chuck out of the lab and replaced it with precision
chuck at the moment.
mahnaz
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