Alignment shift

Mahnaz Mansourpour mahnaz at stanford.edu
Wed Nov 17 10:10:41 PST 2010



Hello all,


I did a training on the system yesterday and I was shocked to find out 
that the  tension on the two latches ( the one  we turn
to keep the   glass frame in tack so the wafers which are lined up not 
move)   is so gone that alignment moved at least by 20 mm.
*I am shocked that no one has reported it.
*
I have taken the chuck out of the lab and replaced it with precision  
chuck at the moment.

mahnaz


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