From mahnaz at snf.stanford.edu Mon Feb 5 10:18:46 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Feb 2007 10:18:46 -0800 Subject: Comment evg-imprint SNF 2007-02-05 10:18:45: ran the system in aligner mode Message-ID: on Feb. 1st, to check the wec unit. I had 1 and 1.5 um resolved. ran two wafers in NIL mode and I see that there is more presser on the left side and the edges of the wafer. could be combination of the wec and the MOLD. From mtang at snf.stanford.edu Mon Feb 12 09:33:18 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 Feb 2007 09:33:18 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: From vilanova at snf.stanford.edu Mon Feb 12 10:11:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 10:11:01 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: found the power supply turned off , turn lamp power supply back on , works like charm. From mahnaz at snf.stanford.edu Mon Feb 5 10:18:46 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Feb 2007 10:18:46 -0800 Subject: Comment evg-imprint SNF 2007-02-05 10:18:45: ran the system in aligner mode Message-ID: on Feb. 1st, to check the wec unit. I had 1 and 1.5 um resolved. ran two wafers in NIL mode and I see that there is more presser on the left side and the edges of the wafer. could be combination of the wec and the MOLD. From mtang at snf.stanford.edu Mon Feb 12 09:33:18 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 Feb 2007 09:33:18 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: From vilanova at snf.stanford.edu Mon Feb 12 10:11:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 10:11:01 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: found the power supply turned off , turn lamp power supply back on , works like charm. From mahnaz at snf.stanford.edu Mon Feb 5 10:18:46 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Feb 2007 10:18:46 -0800 Subject: Comment evg-imprint SNF 2007-02-05 10:18:45: ran the system in aligner mode Message-ID: on Feb. 1st, to check the wec unit. I had 1 and 1.5 um resolved. ran two wafers in NIL mode and I see that there is more presser on the left side and the edges of the wafer. could be combination of the wec and the MOLD. From mtang at snf.stanford.edu Mon Feb 12 09:33:18 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 Feb 2007 09:33:18 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: From vilanova at snf.stanford.edu Mon Feb 12 10:11:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 10:11:01 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: found the power supply turned off , turn lamp power supply back on , works like charm. From mahnaz at snf.stanford.edu Mon Feb 5 10:18:46 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Feb 2007 10:18:46 -0800 Subject: Comment evg-imprint SNF 2007-02-05 10:18:45: ran the system in aligner mode Message-ID: on Feb. 1st, to check the wec unit. I had 1 and 1.5 um resolved. ran two wafers in NIL mode and I see that there is more presser on the left side and the edges of the wafer. could be combination of the wec and the MOLD. From mtang at snf.stanford.edu Mon Feb 12 09:33:18 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 Feb 2007 09:33:18 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: From vilanova at snf.stanford.edu Mon Feb 12 10:11:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 10:11:01 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: found the power supply turned off , turn lamp power supply back on , works like charm. From mahnaz at snf.stanford.edu Mon Feb 5 10:18:46 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Feb 2007 10:18:46 -0800 Subject: Comment evg-imprint SNF 2007-02-05 10:18:45: ran the system in aligner mode Message-ID: on Feb. 1st, to check the wec unit. I had 1 and 1.5 um resolved. ran two wafers in NIL mode and I see that there is more presser on the left side and the edges of the wafer. could be combination of the wec and the MOLD. From mtang at snf.stanford.edu Mon Feb 12 09:33:18 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 Feb 2007 09:33:18 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: From vilanova at snf.stanford.edu Mon Feb 12 10:11:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 10:11:01 -0800 Subject: Problem evg-imprint SNF 2007-02-12 09:33:18: Lamp power supply found off Message-ID: found the power supply turned off , turn lamp power supply back on , works like charm.