Comment evg-imprint SNF 2007-02-05 10:18:45: ran the system in aligner mode

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Feb 5 10:18:46 PST 2007


on Feb. 1st, to check the wec unit. I had 1 and 1.5 um 
resolved.
ran two wafers in NIL mode and I see that there is more
 presser on the left side and the edges of the wafer. could be 
combination of the wec and the MOLD.




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