From mahnaz at snf.stanford.edu Tue Apr 6 16:26:05 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 6 Apr 2010 16:26:05 -0700 Subject: Problem evgspraycoat SNF 2010-04-06 16:26:05: fumes inside chamber Message-ID: helped Karthik , just opening the system and trying to load the syringe and clean the chuck can be fatal. From karthikv at snf.stanford.edu Tue Apr 6 16:33:07 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Tue, 6 Apr 2010 16:33:07 -0700 Subject: Problem evgspraycoat SNF 2010-04-06 16:33:07: Dirty chuck causing vacuum problems and residue on backside Message-ID: I kept getting a "Timeout waiting for chuckvacuum on" error. It turned out that this was because of a very dirty chuck. Mario helped clean the chuck which cleared the vacuum problem. However, this left a large amount of residue on the backside of the wafer. I cleaned the chuck with acetone and IPA repeatedly till I didn't see any residue on the wipe. From mahnaz at snf.stanford.edu Thu Apr 8 14:02:29 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 8 Apr 2010 14:02:29 -0700 Subject: Problem evgspraycoat SNF 2010-04-08 14:02:29: wobbly chuck Message-ID: Noticed that the heated chuck was wobbly yesterday 1/7/10 From gsosa at stanford.edu Wed Apr 14 16:00:33 2010 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 14 Apr 2010 16:00:33 -0700 (PDT) Subject: Remote control for heated chuck In-Reply-To: <759953548.4090851271285842282.JavaMail.root@zm08.stanford.edu> Message-ID: <303611331.4092581271286033835.JavaMail.root@zm08.stanford.edu> Hi All.... For those spraycoater users that use the heated chuck feature, You no longer need to go into the fingerwall to turn on the recurculating bath unit or to change the temperature setpoint. All of this can now be done, using the remote control unit located at the tool. It is sitting on top of the chemical cabinet( Please see pictures). The remote control is very simple to use. Just follow these steps and see attached pictures: 1. Turn on the power to the remote control with toggle switch on the top right of remote controller. 2. Turn on the recirculating bath unit with the button in lower left of screen. The unit will start up and the screen will dispay setpoint and actual temperature. 3. Press the setpoint button if you would like to change the temperature setpoint. A popup screen will appear. Use the left/right arrows to change the decimal position. Use the up/down arrows to change the value. Press "Enter" to accept new setpoint value. When you have completed your work, you must: 1. Turn off the recirculating bath unit by pressing the button at the lower/left corner of screen. 2. Turn off the remote control unit using the toggle switch at the top right side of controller. ( Note: Simply turning off the remote control power will not turn off the recirculating bath unit) Please contact a Litho Staff team member if you need more info or you would like to be shown how to use the remote control unit and we will make arrangements. Thanks and Happy Coating... Your SNF Staff -------------- next part -------------- A non-text attachment was scrubbed... Name: Remote Control 1.JPG Type: image/jpeg Size: 1174533 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Remote Control 2.JPG Type: image/jpeg Size: 685358 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Remote Control 3.JPG Type: image/jpeg Size: 198378 bytes Desc: not available URL: From mahnaz at snf.stanford.edu Thu Apr 15 10:35:33 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 15 Apr 2010 10:35:33 -0700 Subject: Comment evgspraycoat SNF 2010-03-10 12:14:53: Coral Inerlock Message-ID: From mahnaz at snf.stanford.edu Thu Apr 15 10:36:22 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 15 Apr 2010 10:36:22 -0700 Subject: Comment evgspraycoat SNF 2010-03-04 15:04:46: controller Message-ID: The controller is back on the system by EV FSE, Richard. From mahnaz at snf.stanford.edu Thu Apr 15 10:47:08 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 15 Apr 2010 10:47:08 -0700 Subject: Problem evgspraycoat SNF 2010-04-15 10:47:07: nozzle head not centered Message-ID: