From pponce at snf.stanford.edu  Fri Aug 13 11:15:46 2010
From: pponce at snf.stanford.edu (pponce at snf.stanford.edu)
Date: Fri, 13 Aug 2010 11:15:46 -0700
Subject: Problem evgspraycoat SNF 2010-08-13 11:15:46: centering is off
Message-ID: <mailman.24.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

The swivel arm is not centered after homing and placing the arm into park position.  After running the center test recipe, the swivel arm slightly overshoots and sprays past center; the resist patch on the wafer was slightly left of center.  The nozzle angle looked ok.



From mahnaz at snf.stanford.edu  Tue Aug 24 15:50:30 2010
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 24 Aug 2010 15:50:30 -0700
Subject: Comment evgspraycoat SNF 2010-08-24 15:50:27: wiped the chamber clean
Message-ID: <mailman.25.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>