Problem evgspraycoat SNF 2010-08-13 11:15:46: centering is off

pponce at snf.stanford.edu pponce at snf.stanford.edu
Fri Aug 13 11:15:46 PDT 2010


The swivel arm is not centered after homing and placing the arm into park position.  After running the center test recipe, the swivel arm slightly overshoots and sprays past center; the resist patch on the wafer was slightly left of center.  The nozzle angle looked ok.




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