From mahnaz at snf.stanford.edu Fri Jul 2 16:09:11 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 2 Jul 2010 16:09:11 -0700 Subject: Problem evgspraycoat SNF 2010-07-02 16:09:10: mouse and door seems problematic Message-ID: keyboard mouse and door problematic, the door sems to get jammed. From gsosa at snf.stanford.edu Tue Jul 13 11:19:19 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 13 Jul 2010 11:19:19 -0700 Subject: Problem evgspraycoat SNF 2010-07-02 16:09:10: mouse and door seems problematic Message-ID: Replaced keyboard and installed separate trackball. Tested OK. Cleaned sliding door tracks and adjusted door interlock key for smoot operation. Tested OK. From gsosa at snf.stanford.edu Tue Jul 13 11:20:19 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 13 Jul 2010 11:20:19 -0700 Subject: Problem evgspraycoat SNF 2010-04-15 10:47:07: nozzle head not centered Message-ID: Tightened up nozzle head and pre-dispense cup. From lindaw at snf.stanford.edu Tue Jul 13 16:56:13 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 13 Jul 2010 16:56:13 -0700 Subject: Problem evgspraycoat SNF 2010-07-13 16:56:12: dispense error Message-ID: During run, right after dispense starts, there is a message reading DIS1:failed to move to position 1888! Very little resist dispensed on the wafer. And for each pass, the available volume of resist shown on the display screen did not change, but remained the same. When I put a syringe of acetone in,(with more volume than the resist syringe) the dispense message changed to DIS1:failed to move to position 3772! I suspect that the automated dispense z-axis driver is not communicating with the computer. I can drive the dilute resist and acetone through the nozzle with the manual z-axis buttons when the nozzle is in the parked position. This leaves me to suspect that it is a communication problem. A way to try and figure out whether it is the nozzle or the dispense driver would be to swap the accumist with the vortex nozzle to see if the same error message turns up. Gary thinks that it probably needs a reboot, but they have to get a new registration code from EVG before trying that. From mahnaz at snf.stanford.edu Wed Jul 14 11:08:04 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Jul 2010 11:08:04 -0700 Subject: Shutdown evgspraycoat SNF 2010-07-14 11:08:03: the door is broken Message-ID: I am bothered that I had reported the problem few days a go and is cleared without the issue being really taken care of. Mario and Jim H. are working on it. From vilanova at snf.stanford.edu Wed Jul 14 15:09:54 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Jul 2010 15:09:54 -0700 Subject: Problem evgspraycoat SNF 2010-07-13 16:56:12: dispense error Message-ID: Re started up services, Fixed door notch and hinges, Cycled wafer Ok to use. From vilanova at snf.stanford.edu Wed Jul 14 15:10:01 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Jul 2010 15:10:01 -0700 Subject: Shutdown evgspraycoat SNF 2010-07-14 11:08:03: the door is broken Message-ID: Re started up services, Fixed door notch and hinges, Cycled wafer Ok to use. From mahnaz at snf.stanford.edu Wed Jul 14 15:36:37 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Jul 2010 15:36:37 -0700 Subject: Comment evgspraycoat SNF 2010-07-14 15:36:36: The door was almost broken Message-ID: this morning. Jum H. and mario spend a lot of time on the system and Mario has labeled the door. Please do not force the door to shut. We can show you how to go about it. From lindaw at snf.stanford.edu Wed Jul 14 15:58:29 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 14 Jul 2010 15:58:29 -0700 Subject: Comment evgspraycoat SNF 2010-07-14 15:58:28: ran test dispense working again Message-ID: rhenn's suggestion to restart the EVG items in the services start stop menu (click on button with two little gears in the bottom windows toolbar, scroll down to EVG item (there are 5) and select one, then select restart from the "action" pull down menu at the top left of the services window) did the trick. Ran a test wafer and the dispense is working correctly again. Thanks Robert!