From mahnaz at snf.stanford.edu Mon Nov 1 09:46:25 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 1 Nov 2010 09:46:25 -0700 Subject: Problem evgspraycoat SNF 2010-10-31 17:18:18: No more syringes Message-ID: Put in 5 more. From kyunglok at snf.stanford.edu Tue Nov 2 22:03:00 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Tue, 2 Nov 2010 22:03:00 -0700 Subject: Problem evgspraycoat SNF 2010-11-02 22:03:00: Machine frozen Message-ID: After loading the first dummy wafer, I ran the recipe. Soon, I found that I chose the wrong recipe and pushed the buttons stop and abort correspondingly before it started to spray resists. But a well-known windows 98 error message about the termination of the program popped up to the screen and the machine stopped. I tried several things I could do such as running the program again and so on but nothing did work. The machine is still frozen and maybe superusers or maintenance people should look at it. From karthikv at snf.stanford.edu Tue Nov 2 22:42:06 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Tue, 2 Nov 2010 22:42:06 -0700 Subject: Comment evgspraycoat SNF 2010-11-02 22:42:06: Machine freezing Message-ID: Since Kyunglok left the resist in the line, came in to purge the line with acetone since I vaguely remembered Chad from EVG mention something about nozzle damage if resist dries up in the nozzle (can staff confirm?). The machine wasn't frozen but the spraycoater software was giving some errors. Restarted the EVG services and hit "Clean-up" and abort till the software reset to a normal state. From mahnaz at snf.stanford.edu Wed Nov 3 11:22:50 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:22:50 -0700 Subject: Problem evgspraycoat SNF 2010-04-06 16:26:05: fumes inside chamber Message-ID: We verified exhaust fume controller hooked correctly. Measured exhaust flow and the coat station and found that exhaust shutter was closed. Added Exhaust open to all the recipes. We realized that NIL tool impacts the exhaust on spray coater so we have it closed for now. From runen at snf.stanford.edu Wed Nov 3 11:24:06 2010 From: runen at snf.stanford.edu (runen at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:24:06 -0700 Subject: Problem evgspraycoat SNF 2010-11-03 11:24:06: Possible issue with N2? Message-ID: When I did my first dummy dispenses today, the machine gave something like the following error: "Missing Machine Ressource (N2)". After I tried pdummy on a dummy wafer, the error was not repeated (even with dummy dispense) From mahnaz at snf.stanford.edu Wed Nov 3 11:24:53 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:24:53 -0700 Subject: Problem evgspraycoat SNF 2010-04-08 14:02:29: wobbly chuck Message-ID: The insert of chuck has eaten away.... Gary has asked for the part and is very expensive. When time permits and we can find out what kind of material is the insert we should try to see if we can make the insert. From mahnaz at snf.stanford.edu Wed Nov 3 14:14:39 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:14:39 -0700 Subject: Problem evgspraycoat SNF 2010-11-02 22:03:00: Machine frozen Message-ID: lab member helped From mahnaz at snf.stanford.edu Wed Nov 3 14:15:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:15:35 -0700 Subject: Problem evgspraycoat SNF 2010-11-03 11:24:06: Possible issue with N2? Message-ID: Runen saw an N2 error on the first wafer but running second wf the problem got cleared. From karthikv at snf.stanford.edu Thu Nov 4 11:16:20 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 4 Nov 2010 11:16:20 -0700 Subject: Problem evgspraycoat SNF 2010-11-04 11:16:19: nozzle off center Message-ID: Nozzle looks a bit off center. Needs correction. From gsosa at snf.stanford.edu Thu Nov 4 15:18:51 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Nov 2010 15:18:51 -0700 Subject: Problem evgspraycoat SNF 2010-11-04 11:16:19: nozzle off center Message-ID: Re-ran the nozzle center program and verified that nozzle is centered. Did not make any mechanical or software corrections. From karthikv at snf.stanford.edu Thu Nov 11 17:29:12 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 11 Nov 2010 17:29:12 -0800 Subject: Problem evgspraycoat SNF 2010-11-11 17:29:11: Message-ID: From karthikv at snf.stanford.edu Thu Nov 11 17:30:47 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 11 Nov 2010 17:30:47 -0800 Subject: Comment evgspraycoat SNF 2010-11-11 17:30:47: Syringes left uncleaned Message-ID: Found 2 syringes in the "used once" rack with resist in them. Users aren't cleaning the syringes properly before putting them back in the racks. From gsosa at snf.stanford.edu Fri Nov 12 07:25:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 12 Nov 2010 07:25:47 -0800 Subject: Problem evgspraycoat SNF 2010-11-11 17:29:11: Message-ID: From mahnaz at snf.stanford.edu Fri Nov 19 15:18:28 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:18:28 -0800 Subject: Comment evgspraycoat SNF 2010-11-19 15:18:27: new syringes Message-ID: I just supplied 5 new ones in to the lab Heasd up that I have only 6 more syringes in my office. I have ordered 25 more about 2 weeks a go.