Problem evgspraycoat SNF 2010-11-02 22:03:00: Machine frozen

kyunglok at kyunglok at
Tue Nov 2 22:03:00 PDT 2010

After loading the first dummy wafer, I ran the recipe. Soon, I found that I chose the wrong recipe and pushed the buttons stop and abort correspondingly before it started to spray resists. But a well-known windows 98 error message about the termination of the program popped up to the screen and the machine stopped. I tried several things I could do such as running the program again and so on but nothing did work. The machine is still frozen and maybe superusers or maintenance people should look at it.

More information about the evgspraycoat-pcs mailing list