Comment evgspraycoat SNF 2010-11-02 22:42:06: Machine freezing

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Tue Nov 2 22:42:06 PDT 2010


Since Kyunglok left the resist in the line, came in to purge the line with acetone since I vaguely remembered Chad from EVG mention something about nozzle damage if resist dries up in the nozzle (can staff confirm?).
The machine wasn't frozen but the spraycoater software was giving some errors. Restarted the EVG services and hit "Clean-up" and abort till the software reset to a normal state. 




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