Problem evgspraycoat SNF 2010-11-03 11:24:06: Possible issue with N2?

runen at snf.stanford.edu runen at snf.stanford.edu
Wed Nov 3 11:24:06 PDT 2010


When I did my first dummy dispenses today, the machine gave something like the following error: "Missing Machine Ressource (N2)". After I tried pdummy on a dummy wafer, the error was not repeated (even with dummy dispense)




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