From gsosa at snf.stanford.edu  Fri Oct  8 14:48:58 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 8 Oct 2010 14:48:58 -0700
Subject: Comment evgspraycoat SNF 2010-10-08 14:48:58: Nozzle Centering 10/8
Message-ID: <mailman.29.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

Adjusted nozzle centeri position using the centering test job. Made a mechanical adjustment of D/A about 1/4" to the rear. Updated center position of sweep arm from 43000 to 42750. User verified OK results. 



From gsosa at snf.stanford.edu  Mon Oct 18 10:05:11 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 18 Oct 2010 10:05:11 -0700
Subject: Problem evgspraycoat SNF 2010-04-06 16:33:07: Dirty chuck causing vacuum problems and residue on backside
Message-ID: <mailman.30.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>




From karthikv at snf.stanford.edu  Mon Oct 18 18:22:27 2010
From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu)
Date: Mon, 18 Oct 2010 18:22:27 -0700
Subject: Problem evgspraycoat SNF 2010-10-18 18:22:26: Syringe racks getting full
Message-ID: <mailman.31.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

No space to put "Acetone Only" syringe.



From gsosa at snf.stanford.edu  Wed Oct 20 11:02:06 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 20 Oct 2010 11:02:06 -0700
Subject: Shutdown evgspraycoat SNF 2010-10-20 11:02:06: System Clean
Message-ID: <mailman.32.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

Cleaning the system



From gsosa at snf.stanford.edu  Thu Oct 21 09:23:38 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 21 Oct 2010 09:23:38 -0700
Subject: Shutdown evgspraycoat SNF 2010-10-20 11:02:06: System Clean
Message-ID: <mailman.33.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

Removed and cleaned process bowl assembly, chuck and heat exchanger. Cleaned duct for process bowl . General wipe down of system. Re-assemble coater bowl and checked for leaks. Reset all hardware. Cycled wafers with test program - All functioning OK. System ready for use.



From gsosa at snf.stanford.edu  Thu Oct 21 09:24:52 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 21 Oct 2010 09:24:52 -0700
Subject: Problem evgspraycoat SNF 2010-10-18 18:22:26: Syringe racks getting full
Message-ID: <mailman.34.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

Removed excess syringed from the "acetone only" drawer. Will set aside in maintenance cabinet.



From runen at snf.stanford.edu  Sun Oct 31 17:18:18 2010
From: runen at snf.stanford.edu (runen at snf.stanford.edu)
Date: Sun, 31 Oct 2010 17:18:18 -0700
Subject: Problem evgspraycoat SNF 2010-10-31 17:18:18: No more syringes
Message-ID: <mailman.35.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

no more new or used once syringes (abundance of acetone syringes, however)