Shutdown evgspraycoat SNF 2010-10-20 11:02:06: System Clean

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 21 09:23:38 PDT 2010


Removed and cleaned process bowl assembly, chuck and heat exchanger. Cleaned duct for process bowl . General wipe down of system. Re-assemble coater bowl and checked for leaks. Reset all hardware. Cycled wafers with test program - All functioning OK. System ready for use.




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