From jparker at snf.stanford.edu  Tue Oct  4 15:28:46 2011
From: jparker at snf.stanford.edu (jparker at snf.stanford.edu)
Date: Tue, 4 Oct 2011 15:28:46 -0700
Subject: Problem evgspraycoat SNF 2011-10-04 15:28:46: No chuck vacuum
Message-ID: <mailman.85.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

When trying to run a recipe, got an error message stating a problem with the chuck vaccum. Chuck vacuum reads at/near 0. Restarting services did not fix the problem.



From gsosa at snf.stanford.edu  Wed Oct  5 15:34:54 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 5 Oct 2011 15:34:54 -0700
Subject: Problem evgspraycoat SNF 2011-10-04 15:28:46: No chuck vacuum
Message-ID: <mailman.86.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

Cleaned the wafer chuck. Checked all facilities guages- All OK. Tested operation-OK.



From mahnaz at snf.stanford.edu  Fri Oct 14 08:52:01 2011
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Fri, 14 Oct 2011 08:52:01 -0700
Subject: Shutdown evgspraycoat SNF 2011-10-14 08:52:01: password expired
Message-ID: <mailman.87.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Fri Oct 14 14:40:02 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 14 Oct 2011 14:40:02 -0700
Subject: Shutdown evgspraycoat SNF 2011-10-14 08:52:01: password expired
Message-ID: <mailman.88.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

The new key code issued by EVG to activate the application software does not work. EVG notified and will request a new code from Austria. 



From gsosa at snf.stanford.edu  Fri Oct 14 14:41:11 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 14 Oct 2011 14:41:11 -0700
Subject: Shutdown evgspraycoat SNF 2011-10-14 14:41:11: Key-code expired
Message-ID: <mailman.89.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

The new key code issued by EVG to activate the application software does not work. EVG notified and will request a new code from Austria. 



From gsosa at snf.stanford.edu  Mon Oct 17 09:57:15 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 17 Oct 2011 09:57:15 -0700
Subject: Shutdown evgspraycoat SNF 2011-10-14 14:41:11: Key-code expired
Message-ID: <mailman.90.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

Installed new key code to activate tool application software. Reset the system hardware. Tested tool fuction with test job. All OK.