From ludwig at snf.stanford.edu  Mon Apr  9 18:53:08 2012
From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu)
Date: Mon, 9 Apr 2012 18:53:08 -0700
Subject: Shutdown evgspraycoat SNF 2012-04-09 18:53:07: No vaccum and no connection to machine
Message-ID: <mailman.95.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

first error that came up was no chuck vaccum
then J and I tried again and the next error is 'no connection to machine service"



From gsosa at snf.stanford.edu  Tue Apr 10 08:49:34 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 10 Apr 2012 08:49:34 -0700
Subject: Shutdown evgspraycoat SNF 2012-04-09 18:53:07: No vaccum and no connection to machine
Message-ID: <mailman.96.1356281658.3767.evgspraycoat-pcs@snf.stanford.edu>

Restarted motion and I/O services. Cycled wafers- All OK