Problem evgspraycoat SNF 2012-10-25 23:07:36: Message that would not let spray continue

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Dec 23 08:54:18 PST 2012


The cleancounter had counted down to 0. Reset the clean counter back to 200 wafers. Tested operation- All OK.



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