From kyunglok at stanford.edu  Tue Nov  2 22:09:52 2010
From: kyunglok at stanford.edu (Kyunglok Kim)
Date: Tue, 2 Nov 2010 22:09:52 -0700 (PDT)
Subject: Station frozen
In-Reply-To: <180154793.13369.1288760608792.JavaMail.root@zm03.stanford.edu>
Message-ID: <1936975808.13497.1288760992412.JavaMail.root@zm03.stanford.edu>

Dear spray-coater users,

I enabled the spray-coater today. After loading the first dummy wafer, I ran the recipe.
Soon, I found that I chose the wrong recipe and pushed the buttons 'stop' and 'abort' correspondingly before it started to spray resists.
But a well-known windows 98 error message about the termination of the program popped up to the screen and the machine stopped.
I tried several things I could do such as running the program again and so on but nothing did work.
The machine is still frozen and maybe superusers or maintenance people should look at it.

My sample wafer is still on the chuck and I don't remove the resist-filled syringe.
I cannot clean the station since the cover shield is up.
I think the remaining things to be cleaned are the nozzle and the syringe since there is even no activity of spraying resists due to the program error.
Sorry for the inconvenience.

Bests,
Kyunglok


From kyunglok at stanford.edu  Tue Nov  2 22:36:26 2010
From: kyunglok at stanford.edu (Kyunglok Kim)
Date: Tue, 2 Nov 2010 22:36:26 -0700 (PDT)
Subject: Station frozen
In-Reply-To: <1936975808.13497.1288760992412.JavaMail.root@zm03.stanford.edu>
Message-ID: <1340059887.14055.1288762586874.JavaMail.root@zm03.stanford.edu>

Thanks to Karthik, the problem is resolved.
He restarted EVG services programs and clean-up several times. After that, machine becomes normal.

Regards,
Kyunglok

----- Original Message -----
From: "Kyunglok Kim" <kyunglok at stanford.edu>
To: evgspraycoat at snf.stanford.edu
Sent: Tuesday, November 2, 2010 10:09:52 PM
Subject: Station frozen

Dear spray-coater users,

I enabled the spray-coater today. After loading the first dummy wafer, I ran the recipe.
Soon, I found that I chose the wrong recipe and pushed the buttons 'stop' and 'abort' correspondingly before it started to spray resists.
But a well-known windows 98 error message about the termination of the program popped up to the screen and the machine stopped.
I tried several things I could do such as running the program again and so on but nothing did work.
The machine is still frozen and maybe superusers or maintenance people should look at it.

My sample wafer is still on the chuck and I don't remove the resist-filled syringe.
I cannot clean the station since the cover shield is up.
I think the remaining things to be cleaned are the nozzle and the syringe since there is even no activity of spraying resists due to the program error.
Sorry for the inconvenience.

Bests,
Kyunglok


From mahnaz at stanford.edu  Thu Nov 18 09:01:05 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Thu, 18 Nov 2010 09:01:05 -0800
Subject: Solvent bench
Message-ID: <4CE55BD1.103@stanford.edu>


Hello all,

Uli, Jim, Gary and i measured  all the benches and solvent bench in the 
litho area in particular yesterday afternoon.

We made some adjustment to the solvent bench after there was a report of 
smells, i think few days a go.

when using it for SU-8 development and mixing the chemicals for the 
spray coater  let us know if we improved the flow?

Litho team