kyunglok at stanford.edu
Tue Nov 2 22:09:52 PDT 2010
Dear spray-coater users,
I enabled the spray-coater today. After loading the first dummy wafer, I ran the recipe.
Soon, I found that I chose the wrong recipe and pushed the buttons 'stop' and 'abort' correspondingly before it started to spray resists.
But a well-known windows 98 error message about the termination of the program popped up to the screen and the machine stopped.
I tried several things I could do such as running the program again and so on but nothing did work.
The machine is still frozen and maybe superusers or maintenance people should look at it.
My sample wafer is still on the chuck and I don't remove the resist-filled syringe.
I cannot clean the station since the cover shield is up.
I think the remaining things to be cleaned are the nozzle and the syringe since there is even no activity of spraying resists due to the program error.
Sorry for the inconvenience.
More information about the evgspraycoat