From ysohn at snf.stanford.edu Wed Nov 2 12:28:06 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Wed, 2 Nov 2011 12:28:06 -0700 Subject: Problem fiji1 SNF 2011-11-02 12:28:05: transfer arm extended Message-ID: Transfer arm extended message is on and I couldn't run stanby recipe. Left the platen in LL chamber and pumped From jprovine at snf.stanford.edu Wed Nov 2 13:39:47 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 2 Nov 2011 13:39:47 -0700 Subject: Problem fiji1 SNF 2011-11-02 12:28:05: transfer arm extended Message-ID: just pushed the arm back and everything was fine. From dongrip at snf.stanford.edu Fri Nov 4 02:57:16 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 4 Nov 2011 02:57:16 -0700 Subject: Problem fiji1 SNF 2011-11-04 02:57:16: MFC4 error occurred Message-ID: MFC4 H2 error occurred because H2 doesn't flow. From jprovine at snf.stanford.edu Fri Nov 4 08:52:54 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 4 Nov 2011 08:52:54 -0700 Subject: Problem fiji1 SNF 2011-11-04 08:52:54: no H2 flow to fiji2 or fiji1 Message-ID: From tberg at snf.stanford.edu Fri Nov 4 09:18:36 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Nov 2011 09:18:36 -0700 Subject: Problem fiji1 SNF 2011-11-04 08:52:54: no H2 flow to fiji2 or fiji1 Message-ID: Found supply valve for H2 turned off. Turned it back on From jprovine at snf.stanford.edu Fri Nov 4 10:34:23 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 4 Nov 2011 10:34:23 -0700 Subject: Problem fiji1 SNF 2011-11-04 02:57:16: MFC4 error occurred Message-ID: H2 turned off for unknown reason. it is back on. From fpurkl at snf.stanford.edu Mon Nov 7 17:04:44 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Mon, 7 Nov 2011 17:04:44 -0800 Subject: Shutdown fiji1 SNF 2011-11-07 17:04:43: Tray lost Message-ID: When taking the tray out of the chamber, the tray fell off the prongs and is now blocking the gate valve. From jprovine at snf.stanford.edu Mon Nov 7 18:14:14 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 7 Nov 2011 18:14:14 -0800 Subject: Shutdown fiji1 SNF 2011-11-07 17:04:43: Tray lost Message-ID: tray recovered From jprovine at snf.stanford.edu Mon Nov 7 18:16:21 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 7 Nov 2011 18:16:21 -0800 Subject: Comment fiji1 SNF 2011-10-27 10:53:03: precursor status Message-ID: outdated From jprovine at snf.stanford.edu Mon Nov 7 18:16:35 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 7 Nov 2011 18:16:35 -0800 Subject: Comment fiji1 SNF 2011-11-07 18:16:34: precursor status Message-ID: water tma tdma-Ti From dongrip at snf.stanford.edu Sun Nov 13 06:24:00 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 13 Nov 2011 06:24:00 -0800 Subject: Shutdown fiji1 SNF 2011-11-13 06:24:00: Sample chuck was dropped off in the middle of unloading... Message-ID: When unloading, the sample chuck was dropped off in the middle. I tried to re-connect the chuck with the arm, but I couldn't... My samples are still on the chuck, and the system is under vacuum. For just in case, I set the chamber temperature as 60C. I'm really sorry for your inconvenience... From jprovine at snf.stanford.edu Sun Nov 13 13:26:59 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 13 Nov 2011 13:26:59 -0800 Subject: Shutdown fiji1 SNF 2011-11-13 06:24:00: Sample chuck was dropped off in the middle of unloading... Message-ID: recovered wafers, and sample holder. the wafers are in the trays left next to fiji1. there was no need to set the chamber heater to 60C and in fact that was not a good idea because now the chamber was significantly lower temperature than the precursor lines (not allowed by tools rules) and the chamber has endured a needless major temperature cycle. please do not do that going forward. just set the chamber at a nominal operation value like 200C. From jprovine at snf.stanford.edu Tue Nov 15 17:25:51 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 15 Nov 2011 17:25:51 -0800 Subject: Comment fiji1 SNF 2011-11-15 17:25:50: tdma-Ti precursor empty Message-ID: the tdma-ti precursor on fiji1 is empty. this may have affected recent runs on the system. did you check your pulses? i will refill and install the new cyclinder this week. From jprovine at snf.stanford.edu Wed Nov 16 15:59:41 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 16 Nov 2011 15:59:41 -0800 Subject: Comment fiji1 SNF 2011-11-16 15:59:40: refilling Ti precursor thursday Message-ID: From jprovine at snf.stanford.edu Fri Nov 18 23:57:36 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 18 Nov 2011 23:57:36 -0800 Subject: Comment fiji1 SNF 2011-11-15 17:25:50: tdma-Ti precursor empty Message-ID: refilled and installed on fiji2 From jprovine at snf.stanford.edu Fri Nov 18 23:57:45 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 18 Nov 2011 23:57:45 -0800 Subject: Comment fiji1 SNF 2011-11-16 15:59:40: refilling Ti precursor thursday Message-ID: refilled and installed on fiji2 From jprovine at snf.stanford.edu Fri Nov 18 23:57:50 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 18 Nov 2011 23:57:50 -0800 Subject: Comment fiji1 SNF 2011-11-07 18:16:34: precursor status Message-ID: logged From jprovine at snf.stanford.edu Fri Nov 18 23:58:27 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 18 Nov 2011 23:58:27 -0800 Subject: Comment fiji1 SNF 2011-11-18 23:58:26: precursor status Message-ID: water tma (alumina, AlN) Me3(MeCp)Pt (Pt) From hazeghi at snf.stanford.edu Sat Nov 19 16:47:37 2011 From: hazeghi at snf.stanford.edu (hazeghi at snf.stanford.edu) Date: Sat, 19 Nov 2011 16:47:37 -0800 Subject: Comment fiji1 SNF 2011-11-19 16:47:37: Pins not fully inserted Message-ID: Cannot load the plate into the chamber probably due to pins not fully inserted into the holder. From jprovine at snf.stanford.edu Sun Nov 20 07:24:34 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 20 Nov 2011 07:24:34 -0800 Subject: Comment fiji1 SNF 2011-11-19 16:47:37: Pins not fully inserted Message-ID: pins fully inserted...everything fine. From jprovine at snf.stanford.edu Wed Nov 23 02:02:00 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 23 Nov 2011 02:02:00 -0800 Subject: Comment fiji1 SNF 2011-11-18 23:58:26: precursor status Message-ID: logged From jprovine at snf.stanford.edu Wed Nov 23 02:02:31 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 23 Nov 2011 02:02:31 -0800 Subject: Comment fiji1 SNF 2011-11-23 02:02:31: precursor status Message-ID: water tma tdma-Ti this status remains unchanged until 11/28/2011 at least