From jprovine at snf.stanford.edu Tue Oct 4 09:54:40 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 4 Oct 2011 09:54:40 -0700 Subject: Comment fiji_l SNF 2011-10-04 09:54:39: update on plasma issue Message-ID: the matching network has been confirmed to not be the issue. currently, cambridge nanotech is trying to diagnose the issue from the run data sent to them. i'll update again later this week. From jprovine at snf.stanford.edu Wed Oct 5 11:23:31 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 5 Oct 2011 11:23:31 -0700 Subject: Shutdown fiji1 SNF 2011-10-05 11:23:31: e-box failure and rf plasma update Message-ID: Cambridge Nanotech was here this morning to check out the fiji1 & fiji2. on the fiji1, the plasma issues are most likely to be due to a failing RF power supply. a new one is being shipped. while investigating that problem, the e-box (the electronics module that controls all the elements of the system and communicates with the control computer by USB, failed. it is not powering on and cambridge nanotech is taking this opportunity to ship us a new e-box that is a more up to date version compared to the one currently on the system. finally the misalignment between the substrate carrier and the transfer arm that has existed for a while (the pins do not go all the way in) will be addressed by a new design of transfer arm-substrate carrier mechanical interface. this new interface is the new standard for the fijis, but the redesign occurred after our purchase. the new interface pieces are also being shipped to snf. From jprovine at snf.stanford.edu Wed Oct 5 18:52:37 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 5 Oct 2011 18:52:37 -0700 Subject: Comment fiji1 SNF 2011-10-05 18:52:36: fiji1 remains down for new parts Message-ID: we are awaiting the replacement parts for fiji1 (new ebox, new rf power supply, new transfer arm interface to substrate carrier). best estimate is that the tool is offline for at least thursday. i'll update again as i know more. From jprovine at snf.stanford.edu Sun Oct 23 13:04:12 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Oct 2011 13:04:12 -0700 Subject: Comment fiji1 SNF 2011-10-23 13:04:11: update on replacement parts Message-ID: we have received new transfer arm components and a new RF plasma supply. we are still waiting on a new ebox to get back online and also the new ozone generator. From jprovine at snf.stanford.edu Tue Oct 25 03:05:47 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 25 Oct 2011 03:05:47 -0700 Subject: Comment fiji1 SNF 2011-10-25 03:05:46: further update on replacement parts Message-ID: joe kruger from cambridge nanotech replaced transfer arm components on fiji1 & fiji2 monday. this should make it much more difficult for users to get the substrate holder stuck. also the new RF power supply for fiji1 was installed. new eboxes arriving later this week and joe will install those this week. this should get fiji1 back on line this week. From jprovine at snf.stanford.edu Wed Oct 26 16:34:38 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 26 Oct 2011 16:34:38 -0700 Subject: Comment fiji1 SNF 2011-10-26 16:34:38: fiji1 repair update Message-ID: the further repairs and replacement parts for fiji1 were finished this afternoon. all the heaters, valves, MFCs, and pump were working fine. i'm baking out the chamber currently and will be running test depositions tomorrow (both thermal and plasma) before releasing the tool. if everything works out fine, i would expect the system to be available to users friday morning (10.28). From jprovine at snf.stanford.edu Wed Oct 26 16:34:52 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 26 Oct 2011 16:34:52 -0700 Subject: Comment fiji1 SNF 2011-08-03 13:06:09: training information Message-ID: now on website From jprovine at snf.stanford.edu Wed Oct 26 16:35:02 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 26 Oct 2011 16:35:02 -0700 Subject: Comment fiji1 SNF 2011-09-26 10:39:01: precursor change Message-ID: logged From jprovine at snf.stanford.edu Thu Oct 27 09:38:04 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 27 Oct 2011 09:38:04 -0700 Subject: Shutdown fiji1 SNF 2011-10-05 11:23:31: e-box failure and rf plasma update Message-ID: new ebox works great. test deposition fine. fiji1 back online. From jprovine at snf.stanford.edu Thu Oct 27 09:38:18 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 27 Oct 2011 09:38:18 -0700 Subject: Problem fiji1 SNF 2011-09-27 12:10:49: plasma power reduced Message-ID: fixed with new ebox and new power supply From jprovine at snf.stanford.edu Thu Oct 27 10:04:24 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 27 Oct 2011 10:04:24 -0700 Subject: Problem fiji1 SNF 2011-10-27 10:04:23: plasma power off Message-ID: after repairs, plasma power is off. i think the unit is just disconnected. system is up for thermal processing, not plasma. plasma should be fixed later today. From jprovine at snf.stanford.edu Thu Oct 27 10:53:04 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 27 Oct 2011 10:53:04 -0700 Subject: Comment fiji1 SNF 2011-10-27 10:53:03: precursor status Message-ID: water tma (alumina, etc) TBTDET (Ta2O5 and TaN) From jprovine at snf.stanford.edu Fri Oct 28 05:52:51 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:52:51 -0700 Subject: Problem fiji1 SNF 2011-10-27 10:04:23: plasma power off Message-ID: plasma power restored. matching network working fine. plasma confirmed. From jprovine at snf.stanford.edu Fri Oct 28 05:53:09 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:53:09 -0700 Subject: Comment fiji1 SNF 2011-10-04 09:54:39: update on plasma issue Message-ID: logged From jprovine at snf.stanford.edu Fri Oct 28 05:53:15 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:53:15 -0700 Subject: Comment fiji1 SNF 2011-10-05 18:52:36: fiji1 remains down for new parts Message-ID: logged From jprovine at snf.stanford.edu Fri Oct 28 05:53:19 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:53:19 -0700 Subject: Comment fiji1 SNF 2011-10-23 13:04:11: update on replacement parts Message-ID: logged From jprovine at snf.stanford.edu Fri Oct 28 05:53:23 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:53:23 -0700 Subject: Comment fiji1 SNF 2011-10-25 03:05:46: further update on replacement parts Message-ID: logged From jprovine at snf.stanford.edu Fri Oct 28 05:53:28 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 28 Oct 2011 05:53:28 -0700 Subject: Comment fiji1 SNF 2011-10-26 16:34:38: fiji1 repair update Message-ID: logged