Comment fiji1 SNF 2011-10-26 16:34:38: fiji1 repair update

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Wed Oct 26 16:34:38 PDT 2011


the further repairs and replacement parts for fiji1 were finished this afternoon.  all the heaters, valves, MFCs, and pump were working fine.  i'm baking out the chamber currently and will be running test depositions tomorrow (both thermal and plasma) before releasing the tool.  if everything works out fine, i would expect the system to be available to users friday morning (10.28).




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