From jasonlin at snf.stanford.edu Wed Sep 14 17:19:00 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 14 Sep 2011 17:19:00 -0700 Subject: Problem fiji_l SNF 2011-09-14 17:19:00: Ta & Ti precursor Message-ID: No pulse observed for the Ta precursor in thermal Ta oxide recipe. Ti precursor is low, may need to use 0.5s pulse width to get appreciable pulse. From jprovine at snf.stanford.edu Thu Sep 15 11:47:14 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 15 Sep 2011 11:47:14 -0700 Subject: Problem fiji_l SNF 2011-09-14 17:19:00: Ta & Ti precursor Message-ID: Ta precursor empty. valve functioning fine. From jprovine at snf.stanford.edu Thu Sep 15 11:47:23 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 15 Sep 2011 11:47:23 -0700 Subject: Comment fiji_l SNF 2011-08-24 10:13:27: precursor change Message-ID: logged From jprovine at snf.stanford.edu Thu Sep 15 11:47:31 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 15 Sep 2011 11:47:31 -0700 Subject: Comment fiji_l SNF 2011-08-25 22:46:10: precursor change Message-ID: logged From jprovine at snf.stanford.edu Thu Sep 15 11:48:01 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 15 Sep 2011 11:48:01 -0700 Subject: Comment fiji_l SNF 2011-09-15 11:48:01: precursor change Message-ID: TDMA-Ti out. TDMA-Hf in. empty Ta precursor removed. From emyers at snf.stanford.edu Sun Sep 18 16:54:14 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 18 Sep 2011 16:54:14 -0700 Subject: Shutdown fiji_l SNF 2011-09-18 16:54:14: Ozone Alarm Message-ID: The local Ozone detector went in to alarm. Used the fire departments portable detector and did not find a reading, although the detector was still registering. The systems will be shut down until the alarm is understood. From tberg at snf.stanford.edu Mon Sep 19 11:19:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Sep 2011 11:19:44 -0700 Subject: Shutdown fiji_l SNF 2011-09-18 16:54:14: Ozone Alarm Message-ID: Alarm not related to FiJi. Level adjusted for background Ozone levels From jprovine at snf.stanford.edu Tue Sep 20 10:18:28 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 20 Sep 2011 10:18:28 -0700 Subject: Comment fiji_l SNF 2011-09-15 11:48:01: precursor change Message-ID: logged From jprovine at snf.stanford.edu Tue Sep 20 10:19:08 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 20 Sep 2011 10:19:08 -0700 Subject: Comment fiji_l SNF 2011-09-20 10:19:08: precursor change Message-ID: TDMA-Hf out TDMA-Ti in... this afternoon (9.20.2011) i'll install TMA for Al2O3 also. From jprovine at snf.stanford.edu Mon Sep 26 10:38:38 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 26 Sep 2011 10:38:38 -0700 Subject: Comment fiji_l SNF 2011-09-20 10:19:08: precursor change Message-ID: updated From jprovine at snf.stanford.edu Mon Sep 26 10:39:01 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 26 Sep 2011 10:39:01 -0700 Subject: Comment fiji_l SNF 2011-09-26 10:39:01: precursor change Message-ID: new full (25g) bottles of TMA and TDMATi installed. From jprovine at snf.stanford.edu Tue Sep 27 12:10:50 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 27 Sep 2011 12:10:50 -0700 Subject: Problem fiji_l SNF 2011-09-27 12:10:49: plasma power reduced Message-ID: the plasma power fell in a run from this morning and while reflected power remains 0W, the forward power reduced significantly (<100W when set for 300W). cambridge nanotech has been contacted. fiji-l fine for thermal processing and fiji-r is unaffected.