Problem fiji_l SNF 2011-09-14 17:19:00: Ta & Ti precursor

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Sep 14 17:19:00 PDT 2011


No pulse observed for the Ta precursor in thermal Ta oxide recipe.
Ti precursor is low, may need to use 0.5s pulse width to get appreciable pulse.




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