From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-01 11:18:46: precursor status Message-ID: <32665245.25.1344293430043.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-06 15:50:57: precursor status Message-ID: <22082006.26.1344293457302.JavaMail.coral@shine> water tdma-ti1 tdma-hf1 From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-15 21:09:43: measured thick HfO Message-ID: <31227095.64.1345090184458.JavaMail.coral@shine> I ran 300 cycles of thermal hafnia using the standard recipe. The measured deposition was 537A. Woollam might be poorly calibrated though. From eldwin at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-16 09:47:38: precursor request Message-ID: <1250890.77.1345135658633.JavaMail.coral@shine> would it be possible to get the alumina precursor on today? as soon as possible... much appreciated. thanks! From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-16 09:47:38: precursor request Message-ID: <12059878.85.1345138652521.JavaMail.coral@shine> met...please make requests earlier. 24 hours in advance is nice. From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-06 15:50:57: precursor status Message-ID: <26998495.86.1345138672730.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-16 10:38:08: precursor status Message-ID: <18557010.87.1345138688898.JavaMail.coral@shine> water tdma-ti 1 tma 2 From asamarao at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-16 11:05:22: Pt and Alumina precursor on Fiji1 tomorrow Message-ID: <703904.89.1345140322774.JavaMail.coral@shine> Hi J/Michelle, Would it be possible to install precursors for deposition both Alumina and Pt on Fiji1 tomorrow (8/17)? Thanks. From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-16 10:38:08: precursor status Message-ID: <19287910.109.1345162338508.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-16 17:12:36: precursor status Message-ID: <2658364.110.1345162356685.JavaMail.coral@shine> water tdma-ti 1 From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-16 11:05:22: Pt and Alumina precursor on Fiji1 tomorrow Message-ID: <21982833.120.1345221227535.JavaMail.coral@shine> challenge met From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-16 17:12:36: precursor status Message-ID: <18269839.121.1345221233593.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-17 09:34:05: precursor status Message-ID: <14376341.122.1345221245711.JavaMail.coral@shine> water Pt tma From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Shutdown fiji1 SNF 2012-08-17 16:00:56: no cooling water Message-ID: <2040242.152.1345244457136.JavaMail.coral@shine> there is currently no process cooling water, which the pumps need. i'm shutting down the system and will bring it back when process cooling water returns. From asamarao at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-18 10:32:39: Alumina on Monday Message-ID: <2703651.202.1345311160319.JavaMail.coral@shine> Assuming the tool comes back up on Monday, I would like to deposit Alumina. Please retain that precursor. From mdickey at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-08-20 08:30:37: ammonia Message-ID: <19289811.20.1345476637893.JavaMail.coral@shine> No ammonia available at this time From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-08-20 08:30:37: ammonia Message-ID: <28360996.30.1345483071324.JavaMail.coral@shine> there is no ammonia processing at this tool currently From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-18 10:32:39: Alumina on Monday Message-ID: <5564223.31.1345483083451.JavaMail.coral@shine> challenge met From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Shutdown fiji1 SNF 2012-08-17 16:00:56: no cooling water Message-ID: <15196654.36.1345483225875.JavaMail.coral@shine> PCW returned. pumps back on and base pressure reached. system stayed hot so it should be ready to go by 10:30am From wmtang at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wmtang at snf.stanford.edu (wmtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-20 11:49:36: Hf precursor Message-ID: <26345211.38.1345488576564.JavaMail.coral@shine> Dear J, Would you please help me put the Hf precursor into Fiji 1 by Aug 21 (Tue) 1:30 pm? Thank you very much. Regards, Stella From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-17 09:34:05: precursor status Message-ID: <22730905.43.1345496671409.JavaMail.coral@shine> changed From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-20 14:04:50: precursor status Message-ID: <4533263.44.1345496690589.JavaMail.coral@shine> tma Pt NOTE: NO WATER HOOKED TO SYSTEM. From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-08-20 14:05:53: ald valve 2 not actuating Message-ID: <28005080.45.1345496754209.JavaMail.coral@shine> ald valve 2 is not actuating and stuck closed. the actuator is delivering signal and pneumatic pressure equal to other lines. the valve must be replaced. From jhaydon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-08-20 14:05:53: ald valve 2 not actuating Message-ID: <3433017.4.1345563602255.JavaMail.coral@shine> From jhaydon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-08-21 08:40:36: Valve 2 not working Message-ID: <28011548.5.1345563636491.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-20 11:49:36: Hf precursor Message-ID: <10042026.6.1345568966178.JavaMail.coral@shine> precursor installed From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-20 14:04:50: precursor status Message-ID: <28671435.7.1345568975217.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-21 10:10:31: precursor status Message-ID: <30528184.8.1345569032627.JavaMail.coral@shine> 0- TMA (bottle 2) 1- TDMA-Hf (bottle 3) 2- OUT OF SERVICE From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-22 10:04:48: Ti precursor request Message-ID: <11702584.45.1345655088488.JavaMail.coral@shine> Ti precursor requested for Thursday night run (starting at 6pm). If possible, it would be nice to leave hafnium precursor on there as well. From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-23 13:14:13: Ti precursor request for the weekend Message-ID: <23611611.83.1345752853742.JavaMail.coral@shine> plan to do two TiN deposition runs From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-22 10:04:48: Ti precursor request Message-ID: <7084674.89.1345758034729.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-21 10:10:31: precursor status Message-ID: <10343764.90.1345758051849.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-23 14:44:04: precursor status Message-ID: <11162755.91.1345758244861.JavaMail.coral@shine> 0- TDMA-Ti (bottle 1) 1- TDMA-Hf (bottle 3) 2- OUT OF SERVICE **PLEASE NOTE- heater jacket from EMPTY valve (2) is moved over to heat TDMA-Ti on valve (0). T readout on Fiji display still shows T on empty valve (2). The temperature reading is correct, the location is not. From jhaydon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-24 12:28:35: we are working on a fix for the problem valves Message-ID: <23661153.142.1345836515800.JavaMail.coral@shine> From eldwin at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-27 17:18:42: Pt/Al2O3 precursor request Message-ID: <4935259.27.1346113124101.JavaMail.coral@shine> Could we have the precursors for platinum and alumina installed for our reservation wednesday morning 10a? Thanks! From jhaydon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-24 12:28:35: we are working on a fix for the problem valves Message-ID: <24696049.41.1346176031591.JavaMail.coral@shine> From jhaydon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-28 10:47:57: new valve has been ordered ETA 1-2 weeks Message-ID: <29839944.42.1346176077711.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-27 17:18:42: Pt/Al2O3 precursor request Message-ID: <7687527.69.1346261485579.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-23 14:44:04: precursor status Message-ID: <20679122.70.1346261505596.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-29 10:33:05: precursor status Message-ID: <26178505.71.1346261585746.JavaMail.coral@shine> 0- TMA (bottle 2) 1- Pt (bottle 2) 2- OUT OF SERVICE From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-23 13:14:13: Ti precursor request for the weekend Message-ID: <21369850.126.1346350588965.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-30 13:45:05: precursor status Message-ID: <6852773.133.1346359506245.JavaMail.coral@shine> 0- TDMA-Zr (bottle 1) 1- TDMA-Hf (bottle 3) 2- OUT OF SERVICE **PLEASE NOTE- heater jacket from EMPTY valve (2) is moved over to heat TDMA-Zr on valve (0). T readout on Fiji display still shows T on empty valve (2). The temperature reading is correct, the location is not. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-29 10:33:05: precursor status Message-ID: <22081486.134.1346359521254.JavaMail.coral@shine> outdated From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-04 12:29:54: TMA request for Al2O3 deposition Message-ID: <28045814.19.1346786995524.JavaMail.coral@shine> i want to do several Al2O3 deposition runs this week. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-04 12:29:54: TMA request for Al2O3 deposition Message-ID: <25467657.21.1346793797892.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-04 14:24:15: precursor status Message-ID: <24783870.22.1346793855912.JavaMail.coral@shine> 0- TMA (bottle 3) 1- TDMA-Hf (bottle 3) 2- OUT OF SERVICE From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-30 13:45:05: precursor status Message-ID: <19868384.23.1346793866921.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-05 14:10:20: precursor status Message-ID: <33536209.42.1346879420294.JavaMail.coral@shine> 0- TMA (bottle 3) 1- TDMA-Ti (bottle 1) 2- OUT OF SERVICE From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-04 14:24:15: precursor status Message-ID: <4842958.43.1346879430303.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-07 11:27:31: clean sample plate installed Message-ID: <23472597.79.1347042452434.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-07 16:00:27: precursor status Message-ID: <33215652.81.1347058828020.JavaMail.coral@shine> 0- EMPTY TMA- New bottle ordered last week. Should arrive next week. TMA (bottle 3) 1- TDMA-Ti (bottle 1) 2- OUT OF SERVICE From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-05 14:10:20: precursor status Message-ID: <29823520.82.1347058840030.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-07 16:00:27: precursor status Message-ID: <28922595.141.1347562126080.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-13 11:49:06: precursor status Message-ID: <6057076.142.1347562147089.JavaMail.coral@shine> 0- TMA (bottle 4) 1- TDMA-Ti (bottle 1) 2- OUT OF SERVICE From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-17 11:06:29: ti requested Message-ID: <21965783.2.1347905189724.JavaMail.coral@shine> ti precursor requested for Tuesday (9/18) from 12AM-10AM (it is currently on the tool I just want to request that it stays on there) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-17 16:24:03: fiji1 upgrade Message-ID: <15384756.9.1347924244133.JavaMail.coral@shine> Hello Fiji1 users, Fiji1 has started the upgrade process to install an MFC for NH3. The tool will be down this evening and all day tomorrow. If there is need for troubleshooting that may continue into Wednesday. I have reserved the tool for that entire time. If the tool comes back up early I will release the reservation and send out an announcement. Thank you! Michelle From fpurkl at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-18 08:13:12: Pt+TMA precursor request Message-ID: <3397361.13.1347981193378.JavaMail.coral@shine> Please install Pt and Al2O3 precursor for my reservation Thur 9/20 1pm. Thanks! From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-18 08:13:12: Pt+TMA precursor request Message-ID: <31713369.65.1348098551304.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-17 16:24:03: fiji1 upgrade Message-ID: <14781843.66.1348098560313.JavaMail.coral@shine> upgrade complete From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-17 11:06:29: ti requested Message-ID: <30244392.67.1348098568341.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-13 11:49:06: precursor status Message-ID: <4486108.68.1348098584349.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-19 16:50:14: precursor status Message-ID: <3970278.69.1348098615358.JavaMail.coral@shine> 0- TMA (bottle 2) 1- TDMA-Ti (bottle 2) 2- Pt (bottle 1) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-07 11:27:31: clean sample plate installed Message-ID: <30820125.70.1348098628397.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-28 10:47:57: new valve has been ordered ETA 1-2 weeks Message-ID: <5557818.71.1348098663465.JavaMail.coral@shine> valve tested with cambridge nanotech. seems to be working. new valve will be installed on savannah. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-08-21 08:40:36: Valve 2 not working Message-ID: <20860095.72.1348098677483.JavaMail.coral@shine> tested with cambridge nanotech engineer. working now. From asamarao at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-21 12:47:33: TiN and Pt on Wed/Thu Message-ID: <28370794.20.1348256854380.JavaMail.coral@shine> Hi J/Michelle, Would like to deposit TiN and Pt on Wed (9/26) and Thu (9/27) on Fiji1. Please load the necessary precursors. Thanks, Ashwin. From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-04 14:19:15: TiN deposition this weekend Message-ID: <22745358.43.1349385555952.JavaMail.coral@shine> Please don't remove the Ti precursor currently installed. From englisht at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: englisht at snf.stanford.edu (englisht at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-06 22:45:44: Pt deposition this Tuesday 9am-1pm Message-ID: <7685286.2.1349588744895.JavaMail.coral@shine> Planning to use Pt precursor currently installed. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-21 12:47:33: TiN and Pt on Wed/Thu Message-ID: <24918309.10.1349712737613.JavaMail.coral@shine> request not needed From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-04 14:19:15: TiN deposition this weekend Message-ID: <2178579.11.1349712748730.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-09 10:37:52: precursor status Message-ID: <8878660.19.1349804273891.JavaMail.coral@shine> 0- TMA (bottle 2) 1- TDMA-Ti (bottle 2) 2- Pt (bottle 100912) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-09-19 16:50:14: precursor status Message-ID: <1437220.20.1349804352681.JavaMail.coral@shine> platinum bottle swapped out. no pulses visible on bottle 1 (marked 6/8/12) at 85C. New bottle also put at 85C. Will need to verify if bottle 1 is empty. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-06 22:45:44: Pt deposition this Tuesday 9am-1pm Message-ID: <24718636.26.1349817209328.JavaMail.coral@shine> request met From sipark at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-11 13:07:37: Precursor request Al, Ti, and water Message-ID: <1551538.91.1349986057818.JavaMail.coral@shine> From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-11 13:46:39: Precursor request Message-ID: <12497817.94.1349988399685.JavaMail.coral@shine> for this weekend or next week: Ti, Hf, H2O From vaishali at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: vaishali at snf.stanford.edu (vaishali at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-11 19:30:21: Plasma NOT working Message-ID: <29069762.106.1350009021785.JavaMail.coral@shine> I tried using Plasma TiN recipe and the plasma didnot come on. I tried other Plasma TiO2 recipe as well and again didnt see Plasma coming on. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-11 13:46:39: Precursor request Message-ID: <33177572.110.1350064719464.JavaMail.coral@shine> hf installed, ti already there. ozone instead of DI for oxygen source. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-11 19:30:21: Plasma NOT working Message-ID: <19533922.111.1350064743702.JavaMail.coral@shine> Plasma fixed- power module not in serial mode. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-11 13:07:37: Precursor request Al, Ti, and water Message-ID: <12307273.112.1350064761890.JavaMail.coral@shine> Ti and Al on tool. ozone for oxygen source From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-12 10:59:52: precursor status Message-ID: <27068509.113.1350064793198.JavaMail.coral@shine> 0- TMA (bottle 2) 1- TDMA-Ti (bottle 2) 2- Hf (bottle 101012) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-09 10:37:52: precursor status Message-ID: <3539915.114.1350064805315.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-12 11:59:34: precursor status Message-ID: <18692980.122.1350068375025.JavaMail.coral@shine> 0- TMA (bottle 2) 1- TDMA-Ti (bottle 2) 2- DI H2O From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-12 10:59:52: precursor status Message-ID: <7471823.123.1350068383113.JavaMail.coral@shine> outdated From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-15 12:32:04: Ru requested for Wednesday at 3:30PM Message-ID: <27032572.13.1350329525268.JavaMail.coral@shine> Need Ru precursor. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-15 12:32:04: Ru requested for Wednesday at 3:30PM Message-ID: <2454845.3.1350492254058.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-17 09:44:45: precursor status Message-ID: <13158105.4.1350492286107.JavaMail.coral@shine> 0- TMA (bottle 2) 1- Ru (bottle 1) 2- DI H2O From asamarao at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-18 10:34:25: TiN on Friday (Oct 19) Message-ID: <3082501.25.1350581665196.JavaMail.coral@shine> Please load the Titanium Nitride precursor for deposition on Friday from 8 AM to Noon. Thanks! From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-18 10:34:25: TiN on Friday (Oct 19) Message-ID: <4163339.40.1350601029173.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-17 09:44:45: precursor status Message-ID: <4386208.41.1350601045182.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-18 15:57:41: precursor status Message-ID: <28948634.42.1350601062190.JavaMail.coral@shine> 0- TMA (bottle 2) 1- Ru (bottle 1) 2- TDMA-Ti (bottle 2) From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-12 11:59:34: precursor status Message-ID: <21383952.71.1350689392809.JavaMail.coral@shine> outdated From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-24 10:29:32: HfO2 and TiN deposition this weekend Message-ID: <29474517.74.1351099772757.JavaMail.coral@shine> Could you please install H2O, Hf and Ti precursors before my run Sunday? Also, last weekend I tried to deposit TiN but the RF plasma power reading was fluctuating, although I got some deposition according to sheet resistance measurement. Thank you very much! From sipark at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-25 10:07:07: Al2O3 & TiN deposition on Thursday reservation Message-ID: <22133220.87.1351184828311.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-25 10:07:07: Al2O3 & TiN deposition on Thursday reservation Message-ID: <19949066.91.1351187825506.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-26 14:15:02: precursor status Message-ID: <14477450.146.1351286102228.JavaMail.coral@shine> 0- DI 1- Hf (bottle 3) 2- TDMA-Ti (bottle 2) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-18 15:57:41: precursor status Message-ID: <6951558.147.1351286108237.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-24 10:29:32: HfO2 and TiN deposition this weekend Message-ID: <25229544.148.1351286117245.JavaMail.coral@shine> request met From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-28 00:16:45: can't load plate Message-ID: <19789202.162.1351408606896.JavaMail.coral@shine> left in the load lock under vacuum From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-10-28 00:17:22: can't load plate Message-ID: <5966582.163.1351408642904.JavaMail.coral@shine> left in the load lock under vacuum From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-28 00:16:45: can't load plate Message-ID: <11116972.0.1351447527089.JavaMail.coral@shine> duplicate From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-10-28 00:17:22: can't load plate Message-ID: <16987790.1.1351448522629.JavaMail.coral@shine> reset plate height. also reset end arm extension sensor which had been knocked 1cm off its position. do not force the arm in any direction. From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-01 10:24:31: Ti precursor probably run out Message-ID: <31342852.149.1351790671317.JavaMail.coral@shine> The resistivity of the TiN film deposited last night is significantly lower than the usual one; also, the the color is obviously different. From luckys at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: luckys at snf.stanford.edu (luckys at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-01 22:16:38: Request for Ni precursor Message-ID: <20914455.167.1351833398390.JavaMail.coral@shine> Hi, could you please install Ni precursor on Fiji1? Thank you. I am planning to do a few runs on Friday afternoon and also in the weekend. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-01 10:24:31: Ti precursor probably run out Message-ID: <31557898.178.1351875596799.JavaMail.coral@shine> precursor verified- bottle is not empty. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-02 14:21:26: precursor status Message-ID: <17054647.182.1351891287048.JavaMail.coral@shine> 0- DI 1- Nickelocene 2- TDMA-Ti (bottle 2) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-10-26 14:15:02: precursor status Message-ID: <20331850.183.1351891295055.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-01 22:16:38: Request for Ni precursor Message-ID: <19760728.184.1351891303080.JavaMail.coral@shine> request met From asamarao at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-05 11:48:06: Pt precursor for Wed/Thu/Fri runs Message-ID: <3539115.21.1352144886780.JavaMail.coral@shine> Could you please load the Alumina and Pt precursor for my reservation on Wed/Thu? Thanks, Ashwin. From zzp at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-05 20:24:14: TiN deposition on 11/10 & 11/11 Message-ID: <11563385.42.1352175854341.JavaMail.coral@shine> Ti precurcor needed for the weekend. From vaishali at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: vaishali at snf.stanford.edu (vaishali at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-06 10:42:13: TiN Deposition on Thursday Message-ID: <18661065.13.1352227334220.JavaMail.coral@shine> Could you please load Ti precursor for me on Thursday afternoon. Thanks, Vaishali From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-06 11:53:38: precursor status Message-ID: <22744006.17.1352231618864.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Pt (bottle 2) 2- TDMA-Ti (bottle 2) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-02 14:21:26: precursor status Message-ID: <5759024.18.1352231625903.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-05 11:48:06: Pt precursor for Wed/Thu/Fri runs Message-ID: <32071061.19.1352231632940.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-06 10:42:13: TiN Deposition on Thursday Message-ID: <1988729.20.1352231656009.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-05 20:24:14: TiN deposition on 11/10 & 11/11 Message-ID: <16900472.0.1352482603285.JavaMail.coral@shine> request met From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-13 10:35:36: ti requested for Wed. (11/14) night run Message-ID: <22957502.13.1352831737007.JavaMail.coral@shine> Ti precursor is already on the tool but I just wanted to make sure it stays on there. Thanks! From alsune at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-13 17:03:20: Request for Ti Precursor for Thursday 15 Nov Message-ID: <13539466.30.1352855001753.JavaMail.coral@shine> Dear J, Would it possible to get Ti precursor for TiN run on this Thursday? Thanks, Wooshik From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-13 10:35:36: ti requested for Wed. (11/14) night run Message-ID: <4677313.48.1352921250631.JavaMail.coral@shine> request met From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-13 17:03:20: Request for Ti Precursor for Thursday 15 Nov Message-ID: <12232574.49.1352921256648.JavaMail.coral@shine> request met From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-15 11:47:11: Ti and Ru precursor requests Message-ID: <5677955.82.1353008832639.JavaMail.coral@shine> I would like to run some Ti and Ru this weekend (Friday night and Saturday morning). Please install these precursors. Do I need special permission (i.e., Engineer status) on the tool to raise the temperatures high enough for the thermal Ru recipe? From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-15 11:47:11: Ti and Ru precursor requests Message-ID: <7246248.122.1353097485569.JavaMail.coral@shine> request met...no you don't need engineer status to run the Ru recipe From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-06 11:53:38: precursor status Message-ID: <20343488.123.1353097499629.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-16 12:25:14: precursor status Message-ID: <8125871.124.1353097515656.JavaMail.coral@shine> 0- TMA (bottle 4) 1- Ru (bottle 1) 2- TDMA-Ti (bottle 2) From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-11-17 13:33:55: cone heater is super slow Message-ID: <17219476.139.1353188036094.JavaMail.coral@shine> I tried to raise the cone temperature from 250C to 270C. After about 3 hours, the temperature reached 265C, at which point I decided to run my recipe at that temperature. From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-11-22 06:40:03: unable to reload platen Message-ID: <11857510.22.1353595203273.JavaMail.coral@shine> Yesterday, when I went to load my samples, there were a lot of particles on the platen (previous user did a low temperature run at 120C followed by my run at 250C). I wiped off the platen with clean wipes. It was difficult to get the platen over the gate but I did it. Today, I unloaded my wafers and was not able to get the platen over the gate. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-11-22 06:40:03: unable to reload platen Message-ID: <1112301.14.1353953376700.JavaMail.coral@shine> pin height adjusted. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-11-17 13:33:55: cone heater is super slow Message-ID: <12565810.15.1353953399939.JavaMail.coral@shine> noted. thanks for the comment. will keep an eye on it. From asamarao at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: asamarao at snf.stanford.edu (asamarao at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-11-30 12:26:04: Screw holding Platen is loose Message-ID: <16072033.3.1354307164870.JavaMail.coral@shine> One of the two screws holding the platen is loose. So the platen bends down more than it should, and does not have the clearance to be placed on the chuck in the chamber. I could not get to load my wafers in. Ashwin. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-11-30 12:26:04: Screw holding Platen is loose Message-ID: <5403811.11.1354560177116.JavaMail.coral@shine> arm adjusted. From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-11-16 12:25:14: precursor status Message-ID: <24754096.0.1354645857672.JavaMail.coral@shine> outdated From jprovine at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-04 10:31:14: precursor status Message-ID: <26708275.1.1354645874877.JavaMail.coral@shine> 0- empty 1- Ru (bottle 1) 2- TDMA-Ti (bottle 2) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-04 16:33:00: precursor status Message-ID: <25952812.20.1354667581979.JavaMail.coral@shine> 0- TDMA-Hf (bottle 101012): The heater for valve 1 is connected to the TDMA-Hf bottle- not the Ru bottle. The temperature readout on the software screen shows the temp on the Ru bottle (the software doesn't allow for us to move the location of the temperature display). 1- Ru (bottle 1)- room temp- heater in use on valve 0 (Hf) 2- TDMA-Ti (bottle 2) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-04 10:31:14: precursor status Message-ID: <16324541.21.1354667590067.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-04 15:23:53: ZrO2 or HfO2 Precursor Request Message-ID: <16220701.22.1354667605224.JavaMail.coral@shine> request met (HfO2 precursor) From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-05 21:38:07: Al2O3 and HfO2 thermal precursors for this weekend Message-ID: <11600861.3.1354772288070.JavaMail.coral@shine> Hi, I'd like to have the Al2O3 and HfO2 precursors for thermal ALD film this weekend (December 8 and 9). Thank you. Steve From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-06 11:06:48: precursor status Message-ID: <32607445.28.1354820808671.JavaMail.coral@shine> 0- TDMA-Hf (bottle 101012): The heater for valve 1 is connected to the TDMA-Hf bottle- not the DI bottle. The temperature readout on the software screen shows the temp on the DI bottle (the software doesn't allow for us to move the location of the temperature display). 1- DI- room temp- heater in use on valve 0 (Hf) 2- TDMA-Ti (bottle 2) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-04 16:33:00: precursor status Message-ID: <27942811.29.1354820816759.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-06 11:07:25: precursor status Message-ID: <19142683.30.1354820846048.JavaMail.coral@shine> 0- TDMA-Hf (bottle 101012): The heater for valve 1 is connected to the TDMA-Hf bottle- not the DI bottle. The temperature readout on the software screen shows the temp on the DI bottle (the software doesn't allow for us to move the location of the temperature display). 1- DI- room temp- heater in use on valve 0 (Hf) 2- TMA (bottle 4) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-06 11:06:48: precursor status Message-ID: <11479632.31.1354820853127.JavaMail.coral@shine> outdated From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-08 22:09:42: HfO2 precursor show weak pulses Message-ID: <4164158.28.1355033383097.JavaMail.coral@shine> I'm not sure if this is normal, seems like it wouldn't be. Whe n the Hf precursor is pulsed, the pressure of the chamber rises only slightly above the base pressure. This is in contrast to what I see for the TMA and DI water pulses. Presursor may be running low. From jprovine at stanford.edu Sun Dec 9 08:04:01 2012 From: jprovine at stanford.edu (J Provine) Date: Sun, 9 Dec 2012 08:04:01 -0800 Subject: Comment fiji1 SNF 2012-12-08 22:09:42: HfO2 precursor show weak pulses In-Reply-To: <4164158.28.1355033383097.JavaMail.coral@shine> References: <4164158.28.1355033383097.JavaMail.coral@shine> Message-ID: this is not uncommon since TDMA-Hf is much less volatile than TMA or H2O. it may still be a sign of precursor running low, but even small pulses saturate the chamber fully. please monitor your film dep as this is the clear way to indicate need for precursor refilling/replacement. j On Sat, Dec 8, 2012 at 10:09 PM, wrote: > I'm not sure if this is normal, seems like it wouldn't be. Whe n the Hf > precursor is pulsed, the pressure of the chamber rises only slightly above > the base pressure. This is in contrast to what I see for the TMA and DI > water pulses. Presursor may be running low. > -------------- next part -------------- An HTML attachment was scrubbed... URL: From svolkman at eecs.berkeley.edu Sun Dec 9 09:02:07 2012 From: svolkman at eecs.berkeley.edu (Steven K. Volkman) Date: Sun, 9 Dec 2012 09:02:07 -0800 Subject: Comment fiji1 SNF 2012-12-08 22:09:42: HfO2 precursor show weak pulses In-Reply-To: References: <4164158.28.1355033383097.JavaMail.coral@shine> Message-ID: Peaks were barely noticeable. Eyeball spectroscopy reveals deficient and non-uniform films. Steve On Dec 9, 2012 8:04 AM, "J Provine" wrote: > this is not uncommon since TDMA-Hf is much less volatile than TMA or H2O. > it may still be a sign of precursor running low, but even small pulses > saturate the chamber fully. please monitor your film dep as this is the > clear way to indicate need for precursor refilling/replacement. > j > > > On Sat, Dec 8, 2012 at 10:09 PM, wrote: > >> I'm not sure if this is normal, seems like it wouldn't be. Whe n the Hf >> precursor is pulsed, the pressure of the chamber rises only slightly above >> the base pressure. This is in contrast to what I see for the TMA and DI >> water pulses. Presursor may be running low. >> > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-10 06:41:30: HfO2 and ZrO2 thermal precursor request Message-ID: <13868860.5.1355150490964.JavaMail.coral@shine> I'd like to request HfO2 and ZrO2 thermal precursors for Dec 11th and 12th (Tue and Wed). Thank you. Steve From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-08 22:09:42: HfO2 precursor show weak pulses Message-ID: <10705024.17.1355159991256.JavaMail.coral@shine> j responded via email to steven. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-05 21:38:07: Al2O3 and HfO2 thermal precursors for this weekend Message-ID: <29962775.18.1355160003385.JavaMail.coral@shine> request met From jrshakya at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-10 10:04:46: Precursor request Message-ID: <28008583.23.1355162687376.JavaMail.coral@shine> Hi Can you plz install W precursor for my run 12/10/12. Thanx -Joe From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-10 10:50:54: opreo Message-ID: <2347637.0.1355165455691.JavaMail.coral@shine> From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-10 10:50:54: opreo Message-ID: <6789355.1.1355165467854.JavaMail.coral@shine> oops From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-10 10:51:36: precursor status Message-ID: <14875627.2.1355165497143.JavaMail.coral@shine> 0- W(bottle 120412): The heater for valve 1 is connected to the TDMA-Hf bottle- not the DI bottle. The temperature readout on the software screen shows the temp on the DI bottle (the software doesn't allow for us to move the location of the temperature display). 1- DI- room temp- heater in use on valve 0 (Hf) 2- TMA (bottle 4) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-06 11:07:25: precursor status Message-ID: <15226917.3.1355165505232.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-10 10:04:46: Precursor request Message-ID: <2418689.4.1355165512310.JavaMail.coral@shine> request met From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-11 08:00:19: Request: Dec 13, Thermal HfO2and ZrO2 precursor Message-ID: <29049890.47.1355241620365.JavaMail.coral@shine> I'd like to request HfO2 and ZrO2 thermal precursors for Dec 13th (Thursday). Thank you. Steve From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-08-15 21:09:43: measured thick HfO Message-ID: <14095358.7.1355250419179.JavaMail.coral@shine> clear comment. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-11 14:28:08: precursor status Message-ID: <13043068.0.1355264889036.JavaMail.coral@shine> 0-DI 1- TDMA-Hf (bottle 120312) 2- Zr (bottle 2) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-10 10:51:36: precursor status Message-ID: <30624226.1.1355264898132.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-10 06:41:30: HfO2 and ZrO2 thermal precursor request Message-ID: <24156236.2.1355264906211.JavaMail.coral@shine> request met From wslee at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-12 07:45:52: request for Hf and Ti precursor Message-ID: <11729694.0.1355327153780.JavaMail.coral@shine> I would like the Hf and Ti precursors for Friday afternoon. Thanks, Scott From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-12-12 11:28:12: Cannot re-insert plate into chamber Message-ID: <19356212.0.1355340493037.JavaMail.coral@shine> Plate transferred fine from the antechamber - upon attempting to reinsert plate was unable to. Plate is now in the antechamber. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-12-12 11:28:12: Cannot re-insert plate into chamber Message-ID: <26400260.0.1355344301028.JavaMail.coral@shine> pins recalibrated From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-13 09:13:04: Observed a significant reduction in peak area for Zr precursor pulses Message-ID: <30239282.22.1355418785369.JavaMail.coral@shine> >From the beginning of my run, I have notced a significant reduction in peak area for the Zr precursor pulses. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-13 09:13:04: Observed a significant reduction in peak area for Zr precursor pulses Message-ID: <4276546.23.1355424489367.JavaMail.coral@shine> discussed with steven. pulses look fine. From pnataraj at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-13 11:27:27: Film Req Message-ID: <16264317.29.1355426848194.JavaMail.coral@shine> Sat DEc 15 ...TMA Sun Dec 16---TMA Mon Dec 17---TMA Tue Dec 18...TMA From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-11 08:00:19: Request: Dec 13, Thermal HfO2and ZrO2 precursor Message-ID: <3789779.30.1355426890563.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-12 07:45:52: request for Hf and Ti precursor Message-ID: <32709007.32.1355431137207.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-13 12:39:30: precursor status Message-ID: <1599370.33.1355431171436.JavaMail.coral@shine> 0-DI 1- TDMA-Hf (bottle 120312) 2- TDMA-Ti (bottle 121312) From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-11 14:28:08: precursor status Message-ID: <22947385.34.1355432171546.JavaMail.coral@shine> outdated From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-14 07:10:44: Soot all over transfer tray and cannot load tray Message-ID: <8586788.10.1355497845297.JavaMail.coral@shine> There was thick, sooty, black layer all over the transfer tray. I tried to be gentle in cleaning it, but I have pushed the tray down too far, and cannot load. From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Shutdown fiji1 SNF 2012-12-14 07:49:35: Tray won't transfer Message-ID: <9845555.13.1355500175806.JavaMail.coral@shine> Can't get tray to transfer into the chamber. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Shutdown fiji1 SNF 2012-12-14 07:49:35: Tray won't transfer Message-ID: <26581810.19.1355510983980.JavaMail.coral@shine> pins adjusted From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-14 16:50:50: precursor status Message-ID: <18459761.38.1355532650446.JavaMail.coral@shine> 0-DI- DO NOT USE. TROUBLESHOOTING IN PROGRESS. 1- TMA (bottle 4) 2- TDMA-Zr (bottle 2) PLEASE USE PLASMA RECIPES ONLY. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-13 12:39:30: precursor status Message-ID: <384082.39.1355532658505.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-14 07:10:44: Soot all over transfer tray and cannot load tray Message-ID: <15668523.40.1355532670562.JavaMail.coral@shine> cleaned and adjusted From trejo10 at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: trejo10 at snf.stanford.edu (trejo10 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-16 11:12:58: Pt Request Message-ID: <19605997.8.1355685179385.JavaMail.coral@shine> May I please use Pt Tuesday and Wednesday? Thank you. OT From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-17 13:09:40: Request Zirconium precursor Message-ID: <27968504.35.1355778581173.JavaMail.coral@shine> For Tuesday and Wednesday From svolkman at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: svolkman at snf.stanford.edu (svolkman at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-18 11:26:27: Request HfO2 precursor for Wednesday Message-ID: <28955864.0.1355858788880.JavaMail.coral@shine> I had previously requested Zr precursor for Wednesday. If possible, could the Zr be replaced with Hf. Thank you. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-18 12:05:02: precursor status Message-ID: <14141119.4.1355861102750.JavaMail.coral@shine> 0-DI- DO NOT USE. TROUBLESHOOTING IN PROGRESS. 1- TMA (bottle 4) 2- Pt (bottle 100412) PLEASE USE PLASMA RECIPES ONLY. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-14 16:50:50: precursor status Message-ID: <21421943.5.1355861109810.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-17 13:09:40: Request Zirconium precursor Message-ID: <11991029.6.1355861116878.JavaMail.coral@shine> outdated From trejo10 at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: trejo10 at snf.stanford.edu (trejo10 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-12-18 13:44:28: Can not transfer sample inside chamber Message-ID: <17146440.9.1355867069195.JavaMail.coral@shine> The plate seems to be bent forward which keeps it from being placed on the chuck. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Problem fiji1 SNF 2012-12-18 13:44:28: Can not transfer sample inside chamber Message-ID: <2554876.12.1355870266112.JavaMail.coral@shine> arm adjusted From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-18 14:39:11: precursor status Message-ID: <5020695.13.1355870351704.JavaMail.coral@shine> 0-TDMA-Hf (bottle 120312)- Heater is from port 1. Fiji display shows heater on port 1 (TMA). 1- TMA (bottle 4)- Unheated. Fiji display shows as heated- heater actually on port 0 (TDMA-Hf). 2- Pt (bottle 100412) PLEASE USE PLASMA RECIPES ONLY. From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-18 12:05:02: precursor status Message-ID: <30213361.14.1355870467066.JavaMail.coral@shine> outdated From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-16 11:12:58: Pt Request Message-ID: <8589.15.1355870477106.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-18 11:26:27: Request HfO2 precursor for Wednesday Message-ID: <20259694.16.1355870485154.JavaMail.coral@shine> request met From mmrincon at snf.stanford.edu Sun Dec 23 08:54:39 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:54:39 -0000 Subject: Comment fiji1 SNF 2012-12-13 11:27:27: Film Req Message-ID: <23809584.17.1355870493172.JavaMail.coral@shine> request met