Comment fiji1 SNF 2012-08-15 21:09:43: measured thick HfO

wslee at snf.stanford.edu wslee at snf.stanford.edu
Sun Dec 23 08:54:39 PST 2012


I ran 300 cycles of thermal hafnia using the standard recipe. The measured deposition was 537A. Woollam might be poorly calibrated though.



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